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- W2044332575 abstract "Major advances in modeling and control will be required to meet future technical challenges in microelectronics manufacturing. This paper reviews the recent applications of fundamental mathematical modeling to unit operations such as crystal growth, lithography, chemical vapor deposition and plasma etching, where there have been some notable successes. Important characteristics of these processes are identified, and the evolution of the standard multiwafer reactor to single wafer reactors processing larger wafers is discussed. The implementation of closed-loop control on key unit operations in microelectronics manufacturing has been extremely limited due to a lack of suitable on-line measurements. There remains considerable promise for application of modern control and optimization techniques in manufacture of integrated circuits." @default.
- W2044332575 created "2016-06-24" @default.
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- W2044332575 date "1995-01-01" @default.
- W2044332575 modified "2023-10-14" @default.
- W2044332575 title "Modeling and control of microelectronics materials processing" @default.
- W2044332575 cites W1498962736 @default.
- W2044332575 cites W1601028004 @default.
- W2044332575 cites W1608769071 @default.
- W2044332575 cites W1628842337 @default.
- W2044332575 cites W1654316564 @default.
- W2044332575 cites W177981576 @default.
- W2044332575 cites W1826812365 @default.
- W2044332575 cites W1902232508 @default.
- W2044332575 cites W1924911799 @default.
- W2044332575 cites W1963678327 @default.
- W2044332575 cites W1966533062 @default.
- W2044332575 cites W1966904126 @default.
- W2044332575 cites W1967439823 @default.
- W2044332575 cites W1968432763 @default.
- W2044332575 cites W1968761733 @default.
- W2044332575 cites W1968805854 @default.
- W2044332575 cites W1969088828 @default.
- W2044332575 cites W1971082942 @default.
- W2044332575 cites W1971425503 @default.
- W2044332575 cites W1976996987 @default.
- W2044332575 cites W1977512281 @default.
- W2044332575 cites W1978470611 @default.
- W2044332575 cites W1979247067 @default.
- W2044332575 cites W1979690646 @default.
- W2044332575 cites W1980038009 @default.
- W2044332575 cites W1982105283 @default.
- W2044332575 cites W1982751864 @default.
- W2044332575 cites W1984828964 @default.
- W2044332575 cites W1985058970 @default.
- W2044332575 cites W1985295984 @default.
- W2044332575 cites W1986471333 @default.
- W2044332575 cites W1986774601 @default.
- W2044332575 cites W1989851435 @default.
- W2044332575 cites W1990163140 @default.
- W2044332575 cites W1991224503 @default.
- W2044332575 cites W1993880392 @default.
- W2044332575 cites W1994669266 @default.
- W2044332575 cites W1995003414 @default.
- W2044332575 cites W1995708057 @default.
- W2044332575 cites W1998563229 @default.
- W2044332575 cites W1999705158 @default.
- W2044332575 cites W2000105033 @default.
- W2044332575 cites W2000641751 @default.
- W2044332575 cites W2003489318 @default.
- W2044332575 cites W2008395432 @default.
- W2044332575 cites W2008486820 @default.
- W2044332575 cites W2010050658 @default.
- W2044332575 cites W2010292568 @default.
- W2044332575 cites W2011198012 @default.
- W2044332575 cites W2014490687 @default.
- W2044332575 cites W2014569259 @default.
- W2044332575 cites W2018044974 @default.
- W2044332575 cites W2018131909 @default.
- W2044332575 cites W2018229666 @default.
- W2044332575 cites W2019540284 @default.
- W2044332575 cites W2019628046 @default.
- W2044332575 cites W2020756220 @default.
- W2044332575 cites W2021288364 @default.
- W2044332575 cites W2021580733 @default.
- W2044332575 cites W2028587315 @default.
- W2044332575 cites W2028844463 @default.
- W2044332575 cites W2029226777 @default.
- W2044332575 cites W2029398618 @default.
- W2044332575 cites W2031015612 @default.
- W2044332575 cites W2031870211 @default.
- W2044332575 cites W2032200964 @default.
- W2044332575 cites W2032633290 @default.
- W2044332575 cites W2032832459 @default.
- W2044332575 cites W2033694882 @default.
- W2044332575 cites W2033852552 @default.
- W2044332575 cites W2037615680 @default.
- W2044332575 cites W2040715537 @default.
- W2044332575 cites W2041349843 @default.
- W2044332575 cites W2042408329 @default.
- W2044332575 cites W2047017676 @default.
- W2044332575 cites W2049018198 @default.
- W2044332575 cites W2049908562 @default.
- W2044332575 cites W2050104290 @default.
- W2044332575 cites W2050143665 @default.
- W2044332575 cites W2051580914 @default.
- W2044332575 cites W2052761446 @default.
- W2044332575 cites W2056910507 @default.
- W2044332575 cites W2057133135 @default.
- W2044332575 cites W2061110363 @default.
- W2044332575 cites W2061456252 @default.