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- W2044334016 abstract "We report results of experiments connected with surface modification of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered- PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials." @default.
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- W2044334016 date "2013-05-03" @default.
- W2044334016 modified "2023-10-14" @default.
- W2044334016 title "Application of EUV optics to surface modification of materials" @default.
- W2044334016 doi "https://doi.org/10.1117/12.2020158" @default.
- W2044334016 hasPublicationYear "2013" @default.
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