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- W2044336002 abstract "A chemically amplified resist, Poly(4-hydroxystyrene-co-tertiarybutylmethacrylate-co-MethacrylphenylPOSS) with different Polyhedral oligosilsesquioxane (POSS) loading has been synthesized by free radical polymerization. The incorporation of POSS units into the resist matrix has been found to affect their RIE resistance in O<sub>2</sub> plasma. The thickness of the films were monitored using ellipsometry at various etch intervals to determine the etch rate and selectivity. It was observed that etch rate of these nanocomposite resists were comparable to the standard PHOST and Novolac based resists. HRTEM and HAADF studies showed that the POSS units exhibit a morphology of rectangular crystallites that are responsible for the plasma etch behavior. We have obtained 120 nm (1:1) (Line/Space) feature using 248 nm lithography. The protecting group, tertiary butyl protecting group exhibits acceptable outgassing. Using e-beam lithography, 70nm pattern feature was obtained." @default.
- W2044336002 created "2016-06-24" @default.
- W2044336002 creator A5007847192 @default.
- W2044336002 creator A5010046244 @default.
- W2044336002 creator A5013385374 @default.
- W2044336002 creator A5032560323 @default.
- W2044336002 creator A5039243994 @default.
- W2044336002 creator A5087626430 @default.
- W2044336002 creator A5091158994 @default.
- W2044336002 date "2005-05-04" @default.
- W2044336002 modified "2023-10-16" @default.
- W2044336002 title "Material design and evaluation of nanocomposite resist for next generation lithography" @default.
- W2044336002 doi "https://doi.org/10.1117/12.597308" @default.
- W2044336002 hasPublicationYear "2005" @default.
- W2044336002 type Work @default.
- W2044336002 sameAs 2044336002 @default.
- W2044336002 citedByCount "4" @default.
- W2044336002 countsByYear W20443360022013 @default.
- W2044336002 crossrefType "proceedings-article" @default.
- W2044336002 hasAuthorship W2044336002A5007847192 @default.
- W2044336002 hasAuthorship W2044336002A5010046244 @default.
- W2044336002 hasAuthorship W2044336002A5013385374 @default.
- W2044336002 hasAuthorship W2044336002A5032560323 @default.
- W2044336002 hasAuthorship W2044336002A5039243994 @default.
- W2044336002 hasAuthorship W2044336002A5087626430 @default.
- W2044336002 hasAuthorship W2044336002A5091158994 @default.
- W2044336002 hasConcept C1012414 @default.
- W2044336002 hasConcept C105487726 @default.
- W2044336002 hasConcept C136525101 @default.
- W2044336002 hasConcept C137637335 @default.
- W2044336002 hasConcept C142724271 @default.
- W2044336002 hasConcept C162117346 @default.
- W2044336002 hasConcept C171250308 @default.
- W2044336002 hasConcept C178790620 @default.
- W2044336002 hasConcept C18293161 @default.
- W2044336002 hasConcept C185592680 @default.
- W2044336002 hasConcept C19067145 @default.
- W2044336002 hasConcept C191897082 @default.
- W2044336002 hasConcept C192562407 @default.
- W2044336002 hasConcept C200274948 @default.
- W2044336002 hasConcept C204223013 @default.
- W2044336002 hasConcept C204787440 @default.
- W2044336002 hasConcept C2779227376 @default.
- W2044336002 hasConcept C49040817 @default.
- W2044336002 hasConcept C53524968 @default.
- W2044336002 hasConcept C71924100 @default.
- W2044336002 hasConcept C92880739 @default.
- W2044336002 hasConceptScore W2044336002C1012414 @default.
- W2044336002 hasConceptScore W2044336002C105487726 @default.
- W2044336002 hasConceptScore W2044336002C136525101 @default.
- W2044336002 hasConceptScore W2044336002C137637335 @default.
- W2044336002 hasConceptScore W2044336002C142724271 @default.
- W2044336002 hasConceptScore W2044336002C162117346 @default.
- W2044336002 hasConceptScore W2044336002C171250308 @default.
- W2044336002 hasConceptScore W2044336002C178790620 @default.
- W2044336002 hasConceptScore W2044336002C18293161 @default.
- W2044336002 hasConceptScore W2044336002C185592680 @default.
- W2044336002 hasConceptScore W2044336002C19067145 @default.
- W2044336002 hasConceptScore W2044336002C191897082 @default.
- W2044336002 hasConceptScore W2044336002C192562407 @default.
- W2044336002 hasConceptScore W2044336002C200274948 @default.
- W2044336002 hasConceptScore W2044336002C204223013 @default.
- W2044336002 hasConceptScore W2044336002C204787440 @default.
- W2044336002 hasConceptScore W2044336002C2779227376 @default.
- W2044336002 hasConceptScore W2044336002C49040817 @default.
- W2044336002 hasConceptScore W2044336002C53524968 @default.
- W2044336002 hasConceptScore W2044336002C71924100 @default.
- W2044336002 hasConceptScore W2044336002C92880739 @default.
- W2044336002 hasLocation W20443360021 @default.
- W2044336002 hasOpenAccess W2044336002 @default.
- W2044336002 hasPrimaryLocation W20443360021 @default.
- W2044336002 hasRelatedWork W1451772226 @default.
- W2044336002 hasRelatedWork W1534103146 @default.
- W2044336002 hasRelatedWork W1997209382 @default.
- W2044336002 hasRelatedWork W2003241729 @default.
- W2044336002 hasRelatedWork W2029453937 @default.
- W2044336002 hasRelatedWork W2058970277 @default.
- W2044336002 hasRelatedWork W2087667468 @default.
- W2044336002 hasRelatedWork W41803155 @default.
- W2044336002 hasRelatedWork W4211055228 @default.
- W2044336002 hasRelatedWork W4233959639 @default.
- W2044336002 isParatext "false" @default.
- W2044336002 isRetracted "false" @default.
- W2044336002 magId "2044336002" @default.
- W2044336002 workType "article" @default.