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- W2044336477 abstract "This work presents an application of reactive ion etching (RIE) for effective tuning of spectral response and the refractive-index (RI) sensitivity of diamond-like carbon (DLC) nano-coated long-period gratings (LPGs). The technique allows for an efficient and well controlled etching of the DLC by means of O<sub>2</sub> and CF<sub>4</sub> plasma. The effect of DLC nanocoating etching on spectral properties of the LPGs is discussed. We correlated the decrease in DLC thickness with the shift of the LPG resonance wavelength. The thinning of the overlay effectively changes the distribution of the cladding modes and thus it also has an impact on the device’s RI sensitivity. The advantage of this approach is a capability for post-processing of the nano-coated structures with a good precision (etching rate from 4.6 to 8.1 nm/min for O<sub>2</sub> plasma), cleaning the samples and their re-coating according to requested needs." @default.
- W2044336477 created "2016-06-24" @default.
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- W2044336477 date "2013-10-15" @default.
- W2044336477 modified "2023-09-27" @default.
- W2044336477 title "Plasma post-processing of diamond-like carbon nano-coated long-period gratings" @default.
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- W2044336477 doi "https://doi.org/10.1117/12.2031698" @default.
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