Matches in SemOpenAlex for { <https://semopenalex.org/work/W2044399384> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2044399384 endingPage "2131" @default.
- W2044399384 startingPage "2126" @default.
- W2044399384 abstract "The thickness of UV-irradiated films of poly[p-(tert-butoxycarbonyloxy)styrene] and poly(tert-butyl methacrylate) containing a photoacid generator as a chemically amplified photoresist was reduced by the deprotection of the side chain residues as a result of the acidolysis reaction catalyzed by a photogenerated acidic species. It was observed that the reduction of film thickness is spread laterally on a millimeter scale to unexposed areas upon heating in the presence of 3-phenyl-3,3-ethylenedioxy-1-propyl p-toluenesulfonate as an acid amplifier that displays the autocatalytic acidolysis referred to as acid proliferation. The enlargement of areas showing the thickness reduction was suppressed effectively by covering the films with a glass plate or a polymer film. This observation suggested that the acidolysis reaction of the films is caused predominantly by the migration of acid molecules originated from the acid amplifier through the air. This was confirmed by the transfer of acid molecules to another acid-sensitive polymer layer placed on the acid-generating film through an air gap. The photosensitivity enhancement of the chemically amplified photoresists owing to the acid proliferation is discussed on the basis of these results." @default.
- W2044399384 created "2016-06-24" @default.
- W2044399384 creator A5005477316 @default.
- W2044399384 creator A5029055643 @default.
- W2044399384 creator A5044301966 @default.
- W2044399384 creator A5057045648 @default.
- W2044399384 creator A5082635116 @default.
- W2044399384 date "1999-07-07" @default.
- W2044399384 modified "2023-09-27" @default.
- W2044399384 title "Acid Proliferation Processes of 3-Phenyl-3,3-ethylenedioxypropyl Sulfonates in Photosensitive Polymer Films Leading to “Air Infection”" @default.
- W2044399384 cites W1972375645 @default.
- W2044399384 cites W1973009192 @default.
- W2044399384 cites W1988273205 @default.
- W2044399384 cites W1990277514 @default.
- W2044399384 cites W1995803516 @default.
- W2044399384 cites W2015911412 @default.
- W2044399384 cites W2029481198 @default.
- W2044399384 cites W2032935759 @default.
- W2044399384 cites W2059686685 @default.
- W2044399384 doi "https://doi.org/10.1021/cm9900554" @default.
- W2044399384 hasPublicationYear "1999" @default.
- W2044399384 type Work @default.
- W2044399384 sameAs 2044399384 @default.
- W2044399384 citedByCount "10" @default.
- W2044399384 countsByYear W20443993842015 @default.
- W2044399384 crossrefType "journal-article" @default.
- W2044399384 hasAuthorship W2044399384A5005477316 @default.
- W2044399384 hasAuthorship W2044399384A5029055643 @default.
- W2044399384 hasAuthorship W2044399384A5044301966 @default.
- W2044399384 hasAuthorship W2044399384A5057045648 @default.
- W2044399384 hasAuthorship W2044399384A5082635116 @default.
- W2044399384 hasConcept C132050475 @default.
- W2044399384 hasConcept C134406635 @default.
- W2044399384 hasConcept C15920480 @default.
- W2044399384 hasConcept C178790620 @default.
- W2044399384 hasConcept C185592680 @default.
- W2044399384 hasConcept C186807665 @default.
- W2044399384 hasConcept C188027245 @default.
- W2044399384 hasConcept C192562407 @default.
- W2044399384 hasConcept C204921945 @default.
- W2044399384 hasConcept C2777566558 @default.
- W2044399384 hasConcept C2779227376 @default.
- W2044399384 hasConcept C49040817 @default.
- W2044399384 hasConcept C521977710 @default.
- W2044399384 hasConcept C75473681 @default.
- W2044399384 hasConceptScore W2044399384C132050475 @default.
- W2044399384 hasConceptScore W2044399384C134406635 @default.
- W2044399384 hasConceptScore W2044399384C15920480 @default.
- W2044399384 hasConceptScore W2044399384C178790620 @default.
- W2044399384 hasConceptScore W2044399384C185592680 @default.
- W2044399384 hasConceptScore W2044399384C186807665 @default.
- W2044399384 hasConceptScore W2044399384C188027245 @default.
- W2044399384 hasConceptScore W2044399384C192562407 @default.
- W2044399384 hasConceptScore W2044399384C204921945 @default.
- W2044399384 hasConceptScore W2044399384C2777566558 @default.
- W2044399384 hasConceptScore W2044399384C2779227376 @default.
- W2044399384 hasConceptScore W2044399384C49040817 @default.
- W2044399384 hasConceptScore W2044399384C521977710 @default.
- W2044399384 hasConceptScore W2044399384C75473681 @default.
- W2044399384 hasIssue "8" @default.
- W2044399384 hasLocation W20443993841 @default.
- W2044399384 hasOpenAccess W2044399384 @default.
- W2044399384 hasPrimaryLocation W20443993841 @default.
- W2044399384 hasRelatedWork W1497478637 @default.
- W2044399384 hasRelatedWork W1977312389 @default.
- W2044399384 hasRelatedWork W2016073296 @default.
- W2044399384 hasRelatedWork W2018518438 @default.
- W2044399384 hasRelatedWork W2029624279 @default.
- W2044399384 hasRelatedWork W2064655667 @default.
- W2044399384 hasRelatedWork W2070925143 @default.
- W2044399384 hasRelatedWork W2076275541 @default.
- W2044399384 hasRelatedWork W4200397771 @default.
- W2044399384 hasRelatedWork W2043674180 @default.
- W2044399384 hasVolume "11" @default.
- W2044399384 isParatext "false" @default.
- W2044399384 isRetracted "false" @default.
- W2044399384 magId "2044399384" @default.
- W2044399384 workType "article" @default.