Matches in SemOpenAlex for { <https://semopenalex.org/work/W2044424711> ?p ?o ?g. }
Showing items 1 to 64 of
64
with 100 items per page.
- W2044424711 abstract "Pattern dependencies in plasma etching processes have been widely noted, but only a limited understanding of the fundamental cause exists. Typical pattern dependencies are variations of the etching rate and sidewall profile with line spacing or other changes of the local topography. The dispersion of the ion impingement angle (caused by scattering within the plasma sheath), scattering of ions (by glancing collisions with the profile features), and redeposition of material emitted in the etching process (which blocks the sidewall etching) are thought to be the primary factors in pattern dependencies. In this work, a string-and-point model has been extended to describe both the wafer surface and the interface between the redeposited layer and the underlying material. The etching rate is modeled as an ion-enhanced etching accompanied by isotropic etching which proceeds at a rate which is inversely related to the redeposited film thickness. The model successfully describes phenomena such as "mouse bites" in which the redeposition layer, which blocks the etching, becomes too thin and cavernous etching proceeds from a point midway along the sidewall." @default.
- W2044424711 created "2016-06-24" @default.
- W2044424711 creator A5015454795 @default.
- W2044424711 creator A5079531614 @default.
- W2044424711 date "1990-01-30" @default.
- W2044424711 modified "2023-10-10" @default.
- W2044424711 title "A Profile Evolution Model With Redeposition" @default.
- W2044424711 doi "https://doi.org/10.1117/12.978062" @default.
- W2044424711 hasPublicationYear "1990" @default.
- W2044424711 type Work @default.
- W2044424711 sameAs 2044424711 @default.
- W2044424711 citedByCount "2" @default.
- W2044424711 crossrefType "proceedings-article" @default.
- W2044424711 hasAuthorship W2044424711A5015454795 @default.
- W2044424711 hasAuthorship W2044424711A5079531614 @default.
- W2044424711 hasConcept C100460472 @default.
- W2044424711 hasConcept C107187091 @default.
- W2044424711 hasConcept C120665830 @default.
- W2044424711 hasConcept C121332964 @default.
- W2044424711 hasConcept C1291036 @default.
- W2044424711 hasConcept C130472188 @default.
- W2044424711 hasConcept C159985019 @default.
- W2044424711 hasConcept C160671074 @default.
- W2044424711 hasConcept C177562468 @default.
- W2044424711 hasConcept C184050105 @default.
- W2044424711 hasConcept C191486275 @default.
- W2044424711 hasConcept C192562407 @default.
- W2044424711 hasConcept C2779227376 @default.
- W2044424711 hasConcept C49040817 @default.
- W2044424711 hasConcept C62520636 @default.
- W2044424711 hasConcept C82706917 @default.
- W2044424711 hasConceptScore W2044424711C100460472 @default.
- W2044424711 hasConceptScore W2044424711C107187091 @default.
- W2044424711 hasConceptScore W2044424711C120665830 @default.
- W2044424711 hasConceptScore W2044424711C121332964 @default.
- W2044424711 hasConceptScore W2044424711C1291036 @default.
- W2044424711 hasConceptScore W2044424711C130472188 @default.
- W2044424711 hasConceptScore W2044424711C159985019 @default.
- W2044424711 hasConceptScore W2044424711C160671074 @default.
- W2044424711 hasConceptScore W2044424711C177562468 @default.
- W2044424711 hasConceptScore W2044424711C184050105 @default.
- W2044424711 hasConceptScore W2044424711C191486275 @default.
- W2044424711 hasConceptScore W2044424711C192562407 @default.
- W2044424711 hasConceptScore W2044424711C2779227376 @default.
- W2044424711 hasConceptScore W2044424711C49040817 @default.
- W2044424711 hasConceptScore W2044424711C62520636 @default.
- W2044424711 hasConceptScore W2044424711C82706917 @default.
- W2044424711 hasLocation W20444247111 @default.
- W2044424711 hasOpenAccess W2044424711 @default.
- W2044424711 hasPrimaryLocation W20444247111 @default.
- W2044424711 hasRelatedWork W19452786 @default.
- W2044424711 hasRelatedWork W1991288435 @default.
- W2044424711 hasRelatedWork W2035159056 @default.
- W2044424711 hasRelatedWork W2044427337 @default.
- W2044424711 hasRelatedWork W2082133582 @default.
- W2044424711 hasRelatedWork W2100954478 @default.
- W2044424711 hasRelatedWork W2389091192 @default.
- W2044424711 hasRelatedWork W2765886561 @default.
- W2044424711 hasRelatedWork W2094633807 @default.
- W2044424711 hasRelatedWork W2495723748 @default.
- W2044424711 isParatext "false" @default.
- W2044424711 isRetracted "false" @default.
- W2044424711 magId "2044424711" @default.
- W2044424711 workType "article" @default.