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- W2044479675 abstract "Specialized EPROM cell architectures lead to a host of new difficulties during pattern transfer. Results from patterning stacked gate structure multilayers of WSi<SUB>x</SUB>, polysilicon, SiO<SUB>2</SUB> and Si<SUB>3</SUB>N<SUB>4</SUB> with etching chemistries containing HBr and Cl<SUB>2</SUB> are examined. Strong effects arising from changes in feed composition and wafer temperature are discussed along with some basic mechanisms involved in these interactions." @default.
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- W2044479675 date "1993-04-16" @default.
- W2044479675 modified "2023-10-16" @default.
- W2044479675 title "<title>Profiles and chemistry effects in polysilicon and tungsten silicide EPROM stack etching</title>" @default.
- W2044479675 doi "https://doi.org/10.1117/12.142922" @default.
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