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• W2044619291 endingPage "318" @default.
• W2044619291 startingPage "314" @default.
• W2044619291 abstract "The paper presents a solution for improving the quality of the surface generated during deep wet etching of glass using an HF (49%)/HCl (37%) solution in a volumetric ratio 10:1. Pyrex glass (Corning 7740) and soda lime glass were analyzed. In addition, the characterization of the main masking layers, including photoresist, amorphous silicon, polysilicon and Cr/Au for deep wet etching in the optimal solution, is described." @default.
• W2044619291 created "2016-06-24" @default.
• W2044619291 creator A5000638496 @default.
• W2044619291 creator A5005228845 @default.
• W2044619291 creator A5039659323 @default.
• W2044619291 creator A5056917996 @default.
• W2044619291 creator A5068031255 @default.
• W2044619291 date "2005-08-01" @default.
• W2044619291 modified "2023-09-24" @default.
• W2044619291 title "Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution" @default.
• W2044619291 cites W1495959069 @default.
• W2044619291 cites W1965806310 @default.
• W2044619291 cites W1967409846 @default.
• W2044619291 cites W1968581245 @default.
• W2044619291 cites W2014754355 @default.
• W2044619291 cites W2063656846 @default.
• W2044619291 cites W2082123518 @default.
• W2044619291 cites W2093168656 @default.
• W2044619291 cites W2150143516 @default.
• W2044619291 doi "https://doi.org/10.1016/j.surfcoat.2004.10.094" @default.
• W2044619291 hasPublicationYear "2005" @default.
• W2044619291 type Work @default.
• W2044619291 sameAs 2044619291 @default.
• W2044619291 citedByCount "163" @default.
• W2044619291 countsByYear W20446192912012 @default.
• W2044619291 countsByYear W20446192912013 @default.
• W2044619291 countsByYear W20446192912014 @default.
• W2044619291 countsByYear W20446192912015 @default.
• W2044619291 countsByYear W20446192912016 @default.
• W2044619291 countsByYear W20446192912017 @default.
• W2044619291 countsByYear W20446192912018 @default.
• W2044619291 countsByYear W20446192912019 @default.
• W2044619291 countsByYear W20446192912020 @default.
• W2044619291 countsByYear W20446192912021 @default.
• W2044619291 countsByYear W20446192912022 @default.
• W2044619291 countsByYear W20446192912023 @default.
• W2044619291 crossrefType "journal-article" @default.
• W2044619291 hasAuthorship W2044619291A5000638496 @default.
• W2044619291 hasAuthorship W2044619291A5005228845 @default.
• W2044619291 hasAuthorship W2044619291A5039659323 @default.
• W2044619291 hasAuthorship W2044619291A5056917996 @default.
• W2044619291 hasAuthorship W2044619291A5068031255 @default.
• W2044619291 hasConcept C100460472 @default.
• W2044619291 hasConcept C134406635 @default.
• W2044619291 hasConcept C142362112 @default.
• W2044619291 hasConcept C153349607 @default.
• W2044619291 hasConcept C159985019 @default.
• W2044619291 hasConcept C160671074 @default.
• W2044619291 hasConcept C171250308 @default.
• W2044619291 hasConcept C178790620 @default.
• W2044619291 hasConcept C185592680 @default.
• W2044619291 hasConcept C191897082 @default.
• W2044619291 hasConcept C192562407 @default.
• W2044619291 hasConcept C199289684 @default.
• W2044619291 hasConcept C2777402240 @default.
• W2044619291 hasConcept C2779227376 @default.
• W2044619291 hasConcept C2780841128 @default.
• W2044619291 hasConcept C35288751 @default.
• W2044619291 hasConcept C49040817 @default.
• W2044619291 hasConcept C544956773 @default.
• W2044619291 hasConcept C56052488 @default.
• W2044619291 hasConceptScore W2044619291C100460472 @default.
• W2044619291 hasConceptScore W2044619291C134406635 @default.
• W2044619291 hasConceptScore W2044619291C142362112 @default.
• W2044619291 hasConceptScore W2044619291C153349607 @default.
• W2044619291 hasConceptScore W2044619291C159985019 @default.
• W2044619291 hasConceptScore W2044619291C160671074 @default.
• W2044619291 hasConceptScore W2044619291C171250308 @default.
• W2044619291 hasConceptScore W2044619291C178790620 @default.
• W2044619291 hasConceptScore W2044619291C185592680 @default.
• W2044619291 hasConceptScore W2044619291C191897082 @default.
• W2044619291 hasConceptScore W2044619291C192562407 @default.
• W2044619291 hasConceptScore W2044619291C199289684 @default.
• W2044619291 hasConceptScore W2044619291C2777402240 @default.
• W2044619291 hasConceptScore W2044619291C2779227376 @default.
• W2044619291 hasConceptScore W2044619291C2780841128 @default.
• W2044619291 hasConceptScore W2044619291C35288751 @default.
• W2044619291 hasConceptScore W2044619291C49040817 @default.
• W2044619291 hasConceptScore W2044619291C544956773 @default.
• W2044619291 hasConceptScore W2044619291C56052488 @default.
• W2044619291 hasIssue "1-3" @default.
• W2044619291 hasLocation W20446192911 @default.
• W2044619291 hasOpenAccess W2044619291 @default.
• W2044619291 hasPrimaryLocation W20446192911 @default.
• W2044619291 hasRelatedWork W1509433227 @default.
• W2044619291 hasRelatedWork W1968581245 @default.
• W2044619291 hasRelatedWork W2018975744 @default.
• W2044619291 hasRelatedWork W2117305598 @default.
• W2044619291 hasRelatedWork W2173115049 @default.
• W2044619291 hasRelatedWork W2298122058 @default.
• W2044619291 hasRelatedWork W2360631777 @default.
• W2044619291 hasRelatedWork W2765211057 @default.
• W2044619291 hasRelatedWork W3177375295 @default.
• W2044619291 hasRelatedWork W4309554529 @default.
• W2044619291 hasVolume "198" @default.
• W2044619291 isParatext "false" @default.
• W2044619291 isRetracted "false" @default.
• W2044619291 magId "2044619291" @default.

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