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- W2044656213 startingPage "1315" @default.
- W2044656213 abstract "In the semiconductor and LCD manufacturing industry, there is a strong demand for measuring film thickness and surface profiles of film-covered objects. In this paper, we propose a single-shot algorithm for simultaneous measurement of film thickness and surface profiles. Unlike existing multiple-shot methods, our method requires only one image for measurement and thus it is fast and highly robust against vibration." @default.
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- W2044656213 date "2009-01-01" @default.
- W2044656213 modified "2023-09-25" @default.
- W2044656213 title "Single-shot Interferometry of Film-covered Objects" @default.
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- W2044656213 doi "https://doi.org/10.2493/jjspe.75.1315" @default.
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