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• W2044672084 endingPage "1673" @default.
• W2044672084 startingPage "1671" @default.
• W2044672084 abstract "The electrical performance of metal-insulator-metal capacitors with thicknesses from 3 to 13 nm was investigated. The magnitude of the negative quadratic voltage coefficient of capacitance (VCC) of was found to be inversely proportional to the square of its thickness. A postdeposition anneal at 400 reduced substantially. An equation based on the orientation polarization of the dipole moments in was derived, which fits the measured normalized capacitance density versus voltage across very well. This suggests that the negative quadratic VCC of is due to the orientation polarization." @default.
• W2044672084 created "2016-06-24" @default.
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• W2044672084 date "2011-12-01" @default.
• W2044672084 modified "2023-09-26" @default.
• W2044672084 title "Modeling the Negative Quadratic VCC of $hbox{SiO}_{2}$ in MIM Capacitor" @default.
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• W2044672084 doi "https://doi.org/10.1109/led.2011.2169038" @default.
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