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- W2044672215 abstract "We present a micromachining technique using a fluorocarbon inductively coupled plasma for achieving arbitrary sidewall profiles in silicon, silicon dioxide and lithium niobate that are independent of the substrate crystal orientation." @default.
- W2044672215 created "2016-06-24" @default.
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- W2044672215 date "2008-01-01" @default.
- W2044672215 modified "2023-09-26" @default.
- W2044672215 title "A Novel Micromachining Techniques for Achieving Optical Structures with Arbitrary Sidewall Profiles" @default.
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- W2044672215 doi "https://doi.org/10.1364/fio.2008.fthw4" @default.
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