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• W2044697670 endingPage "324" @default.
• W2044697670 startingPage "319" @default.
• W2044697670 abstract "Aluminum rich oxynitride thin films were prepared using pulsed direct current (DC) magnetron sputtering from an Al95.5Cr2.5Si2 (at.%) target. Two series of films were deposited at 400 °C and 650 °C by changing the O2/(O2 + N2) ratio in the reactive gas from 0% (pure nitrides) to 100% (pure oxides). The films were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and nanoindentation. The results showed the existence of three different regions of microstructure and properties with respect to the oxygen concentration. For the samples deposited at 650 °C in the nitrogen rich region (O2/(O2 + N2) ≤ 0.08), the formation of the h-AlN (002) and Al–N bond were confirmed by XRD and XPS measurements. The hardness of the films was around 30 GPa. In the intermediate region (0.08 ≤ O2/(O2 + N2) ≤ 0.24), the presence of an amorphous structure and the shifting of the binding energies to lower values corresponding to non-stoichiometric compounds were observed and the hardness decreased to 12 GPa. The lowering of mechanical properties was attributed to the transition of the clean target to the reacted target under non-steady state deposition conditions. In the oxygen rich region (0.24 ≤ (O2/(O2 + N2) ≤ 1), the existence of α-Al2O3-(113), α-Al2O3-(116) and Al–O bonds confirmed the domination of this phase in this region of deposition and the hardness increased again to 30–35 GPa. Films deposited at 400 °C showed the same behavior except in the oxygen rich region, where hardness remains low at about 12–14 GPa." @default.
• W2044697670 created "2016-06-24" @default.
• W2044697670 creator A5027524782 @default.
• W2044697670 creator A5039995181 @default.
• W2044697670 creator A5045245118 @default.
• W2044697670 creator A5070101191 @default.
• W2044697670 date "2010-10-01" @default.
• W2044697670 modified "2023-10-16" @default.
• W2044697670 title "Deposition and characterization of pulsed direct current magnetron sputtered Al95.5Cr2.5Si2 (N1−xOx) thin films" @default.
• W2044697670 cites W1968755978 @default.
• W2044697670 cites W1973938587 @default.
• W2044697670 cites W1980929018 @default.
• W2044697670 cites W1981230838 @default.
• W2044697670 cites W1987517542 @default.
• W2044697670 cites W1990703157 @default.
• W2044697670 cites W1992781182 @default.
• W2044697670 cites W2000938707 @default.
• W2044697670 cites W2001055489 @default.
• W2044697670 cites W2005443864 @default.
• W2044697670 cites W2007290630 @default.
• W2044697670 cites W2010941456 @default.
• W2044697670 cites W2012060581 @default.
• W2044697670 cites W2022148910 @default.
• W2044697670 cites W2043108041 @default.
• W2044697670 cites W2044090991 @default.
• W2044697670 cites W2047615267 @default.
• W2044697670 cites W2055719182 @default.
• W2044697670 cites W2062101091 @default.
• W2044697670 cites W2070511428 @default.
• W2044697670 cites W2075208730 @default.
• W2044697670 cites W2077627366 @default.
• W2044697670 cites W2078327408 @default.
• W2044697670 cites W2086710447 @default.
• W2044697670 cites W2375270494 @default.
• W2044697670 doi "https://doi.org/10.1016/j.tsf.2010.07.080" @default.
• W2044697670 hasPublicationYear "2010" @default.
• W2044697670 type Work @default.
• W2044697670 sameAs 2044697670 @default.
• W2044697670 citedByCount "4" @default.
• W2044697670 countsByYear W20446976702014 @default.
• W2044697670 countsByYear W20446976702016 @default.
• W2044697670 crossrefType "journal-article" @default.
• W2044697670 hasAuthorship W2044697670A5027524782 @default.
• W2044697670 hasAuthorship W2044697670A5039995181 @default.
• W2044697670 hasAuthorship W2044697670A5045245118 @default.
• W2044697670 hasAuthorship W2044697670A5070101191 @default.
• W2044697670 hasConcept C113196181 @default.
• W2044697670 hasConcept C127413603 @default.
• W2044697670 hasConcept C144082473 @default.
• W2044697670 hasConcept C147789679 @default.
• W2044697670 hasConcept C151730666 @default.
• W2044697670 hasConcept C159985019 @default.
• W2044697670 hasConcept C171250308 @default.
• W2044697670 hasConcept C175708663 @default.
• W2044697670 hasConcept C178790620 @default.
• W2044697670 hasConcept C185592680 @default.
• W2044697670 hasConcept C19067145 @default.
• W2044697670 hasConcept C191897082 @default.
• W2044697670 hasConcept C192562407 @default.
• W2044697670 hasConcept C194760766 @default.
• W2044697670 hasConcept C22423302 @default.
• W2044697670 hasConcept C26771246 @default.
• W2044697670 hasConcept C2779227376 @default.
• W2044697670 hasConcept C2816523 @default.
• W2044697670 hasConcept C42360764 @default.
• W2044697670 hasConcept C43617362 @default.
• W2044697670 hasConcept C49326732 @default.
• W2044697670 hasConcept C540031477 @default.
• W2044697670 hasConcept C56052488 @default.
• W2044697670 hasConcept C61427134 @default.
• W2044697670 hasConcept C64297162 @default.
• W2044697670 hasConcept C8010536 @default.
• W2044697670 hasConcept C86803240 @default.
• W2044697670 hasConcept C87976508 @default.
• W2044697670 hasConceptScore W2044697670C113196181 @default.
• W2044697670 hasConceptScore W2044697670C127413603 @default.
• W2044697670 hasConceptScore W2044697670C144082473 @default.
• W2044697670 hasConceptScore W2044697670C147789679 @default.
• W2044697670 hasConceptScore W2044697670C151730666 @default.
• W2044697670 hasConceptScore W2044697670C159985019 @default.
• W2044697670 hasConceptScore W2044697670C171250308 @default.
• W2044697670 hasConceptScore W2044697670C175708663 @default.
• W2044697670 hasConceptScore W2044697670C178790620 @default.
• W2044697670 hasConceptScore W2044697670C185592680 @default.
• W2044697670 hasConceptScore W2044697670C19067145 @default.
• W2044697670 hasConceptScore W2044697670C191897082 @default.
• W2044697670 hasConceptScore W2044697670C192562407 @default.
• W2044697670 hasConceptScore W2044697670C194760766 @default.
• W2044697670 hasConceptScore W2044697670C22423302 @default.
• W2044697670 hasConceptScore W2044697670C26771246 @default.
• W2044697670 hasConceptScore W2044697670C2779227376 @default.
• W2044697670 hasConceptScore W2044697670C2816523 @default.
• W2044697670 hasConceptScore W2044697670C42360764 @default.
• W2044697670 hasConceptScore W2044697670C43617362 @default.
• W2044697670 hasConceptScore W2044697670C49326732 @default.
• W2044697670 hasConceptScore W2044697670C540031477 @default.
• W2044697670 hasConceptScore W2044697670C56052488 @default.
• W2044697670 hasConceptScore W2044697670C61427134 @default.

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