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• W2044702892 abstract "A shielded-cathodic-arc-deposition (SCAD) technique was modified and enhanced to improve the deposition rate of droplet-free thin solid film. The technique was based on plasma transportation using the external magnetic field of a permanent magnet or electromagnetic coil. The deposition rate distribution of the titanium nitride (TiN) film was measured. A higher deposition rate at the substrate center was obtained by using a focusing magnet behind the substrate (enhanced shielded-cathodic arc deposition: E-SCAD). A higher and wider deposition rate was realized by using a focusing electromagnetic coil (improved E-SCAD: IE-SCAD)." @default.
• W2044702892 created "2016-06-24" @default.
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• W2044702892 date "2003-06-01" @default.
• W2044702892 modified "2023-09-25" @default.
• W2044702892 title "Enhancement of shielded cathodic arc deposition" @default.
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• W2044702892 doi "https://doi.org/10.1016/s0257-8972(03)00079-3" @default.
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