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• W2044756979 abstract "Carbon films have been deposited on Al2O3(0001) substrates by sputtering a graphite target with 3 keV CH4+, N+, and Ar+ ions. The structure and properties of the films were examined by Auger electron spectrometry, micro-Raman spectroscopy, and optical absorption measurement, and were found to be dependent on which sputtering ions were used. The stability of the carbon films was also examined using Fourier-transformed infra-red spectroscopy by annealing the films at temperatures from 25 to 200 °C." @default.
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• W2044756979 date "1999-01-01" @default.
• W2044756979 modified "2023-09-24" @default.
• W2044756979 title "The effect of sputtering ions on the structure and properties of diamond-like carbon films" @default.
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• W2044756979 doi "https://doi.org/10.1088/0953-8984/11/25/103" @default.
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