Matches in SemOpenAlex for { <https://semopenalex.org/work/W2044779045> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2044779045 endingPage "580" @default.
- W2044779045 startingPage "572" @default.
- W2044779045 abstract "This paper seeks to extend and improve upon an existing 1D isothermal model [1] for the cathode plasma boundary in magnetron discharges. Using an electron energy balance equation and treating the sheath as a source of electron heat flux, the plasma parameter profiles are solved in the pre-sheath, above the sputter trench. The cross-field transport of electrons is assumed to be dominated by Bohm diffusion (and mobility) in the mutually perpendicular electric and magnetic fields, while ions created by electron impact ionization fall directly to the cathode. Solutions show a fall in electron temperature with distance from the sheath-edge, with plasma densities rising by a factor of typically three or four from sheath-edge to plasma. This latter result is a departure from the normal prescription for Bohm sheath formation. Reasonable agreement between the model predictions and Langmuir probe measurements made in the region directly above the `race-track' sputter trench in a commercial magnetron show the usefulness of such simple models." @default.
- W2044779045 created "2016-06-24" @default.
- W2044779045 creator A5056836367 @default.
- W2044779045 date "1998-11-01" @default.
- W2044779045 modified "2023-10-16" @default.
- W2044779045 title "Study of the plasma pre-sheath in magnetron discharges dominated by Bohm diffusion of electrons" @default.
- W2044779045 cites W1970258822 @default.
- W2044779045 cites W1971201268 @default.
- W2044779045 cites W1976970245 @default.
- W2044779045 cites W1988794952 @default.
- W2044779045 cites W2011007597 @default.
- W2044779045 cites W2017537439 @default.
- W2044779045 cites W2027661432 @default.
- W2044779045 cites W2033856825 @default.
- W2044779045 cites W2034277354 @default.
- W2044779045 cites W2041577505 @default.
- W2044779045 cites W2042414791 @default.
- W2044779045 cites W2053797391 @default.
- W2044779045 cites W2058910491 @default.
- W2044779045 cites W2060390956 @default.
- W2044779045 cites W2069493011 @default.
- W2044779045 cites W2071257383 @default.
- W2044779045 cites W2096846784 @default.
- W2044779045 cites W2105185799 @default.
- W2044779045 cites W2122540346 @default.
- W2044779045 doi "https://doi.org/10.1088/0963-0252/7/4/014" @default.
- W2044779045 hasPublicationYear "1998" @default.
- W2044779045 type Work @default.
- W2044779045 sameAs 2044779045 @default.
- W2044779045 citedByCount "25" @default.
- W2044779045 countsByYear W20447790452013 @default.
- W2044779045 countsByYear W20447790452014 @default.
- W2044779045 countsByYear W20447790452020 @default.
- W2044779045 countsByYear W20447790452021 @default.
- W2044779045 countsByYear W20447790452022 @default.
- W2044779045 crossrefType "journal-article" @default.
- W2044779045 hasAuthorship W2044779045A5056836367 @default.
- W2044779045 hasConcept C105812681 @default.
- W2044779045 hasConcept C115260700 @default.
- W2044779045 hasConcept C121332964 @default.
- W2044779045 hasConcept C145148216 @default.
- W2044779045 hasConcept C147120987 @default.
- W2044779045 hasConcept C176118016 @default.
- W2044779045 hasConcept C178790620 @default.
- W2044779045 hasConcept C184779094 @default.
- W2044779045 hasConcept C185592680 @default.
- W2044779045 hasConcept C192039680 @default.
- W2044779045 hasConcept C198291218 @default.
- W2044779045 hasConcept C22175881 @default.
- W2044779045 hasConcept C43503373 @default.
- W2044779045 hasConcept C60799052 @default.
- W2044779045 hasConcept C62520636 @default.
- W2044779045 hasConcept C69357855 @default.
- W2044779045 hasConcept C82706917 @default.
- W2044779045 hasConcept C97355855 @default.
- W2044779045 hasConceptScore W2044779045C105812681 @default.
- W2044779045 hasConceptScore W2044779045C115260700 @default.
- W2044779045 hasConceptScore W2044779045C121332964 @default.
- W2044779045 hasConceptScore W2044779045C145148216 @default.
- W2044779045 hasConceptScore W2044779045C147120987 @default.
- W2044779045 hasConceptScore W2044779045C176118016 @default.
- W2044779045 hasConceptScore W2044779045C178790620 @default.
- W2044779045 hasConceptScore W2044779045C184779094 @default.
- W2044779045 hasConceptScore W2044779045C185592680 @default.
- W2044779045 hasConceptScore W2044779045C192039680 @default.
- W2044779045 hasConceptScore W2044779045C198291218 @default.
- W2044779045 hasConceptScore W2044779045C22175881 @default.
- W2044779045 hasConceptScore W2044779045C43503373 @default.
- W2044779045 hasConceptScore W2044779045C60799052 @default.
- W2044779045 hasConceptScore W2044779045C62520636 @default.
- W2044779045 hasConceptScore W2044779045C69357855 @default.
- W2044779045 hasConceptScore W2044779045C82706917 @default.
- W2044779045 hasConceptScore W2044779045C97355855 @default.
- W2044779045 hasIssue "4" @default.
- W2044779045 hasLocation W20447790451 @default.
- W2044779045 hasOpenAccess W2044779045 @default.
- W2044779045 hasPrimaryLocation W20447790451 @default.
- W2044779045 hasRelatedWork W1963911796 @default.
- W2044779045 hasRelatedWork W2030273386 @default.
- W2044779045 hasRelatedWork W2048189949 @default.
- W2044779045 hasRelatedWork W2071355779 @default.
- W2044779045 hasRelatedWork W2564767379 @default.
- W2044779045 hasRelatedWork W3034737359 @default.
- W2044779045 hasRelatedWork W4309919601 @default.
- W2044779045 hasRelatedWork W4362663149 @default.
- W2044779045 hasRelatedWork W4367186977 @default.
- W2044779045 hasRelatedWork W2005620834 @default.
- W2044779045 hasVolume "7" @default.
- W2044779045 isParatext "false" @default.
- W2044779045 isRetracted "false" @default.
- W2044779045 magId "2044779045" @default.
- W2044779045 workType "article" @default.