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• W2044784643 abstract "A novel low-temperature crystallization method is proposed; the excimer laser annealing (ELA) of amorphous silicon (a-Si) with a hydrogen-modulation-doped layer (ELHMD). The effects of hydrogen on low-energy crystallization by conventional ELA and ELHMD were investigated. As the hydrogen concentration increases, the crystallinity of the polycrystalline silicon (poly-Si) prepared at a low energy density improves. It is considered that the nucleation is enhanced by the desorption energy of hydrogen from the Si-H2 bond during the Si melting. In addition, the film exfoliation by H2 burst can be suppressed using HMD a-Si film." @default.
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• W2044784643 date "2007-01-01" @default.
• W2044784643 modified "2023-10-07" @default.
• W2044784643 title "Excimer Laser Annealing of Hydrogen Modulation Doped a-Si Film" @default.
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• W2044784643 doi "https://doi.org/10.2320/matertrans.48.975" @default.
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