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- W2044822040 abstract "Silicon microactuators capable of very long travel are described. The design is based on a laterally resonant cantilever, driven by an electrothermal shape bimorph located at the root. Performance characteristics are given for deep structures fabricated in bonded silicon-on-insulator material. Peak-to-peak displacements of more than 500 μm are obtained with cantilevers of 14 mm length, 30 μm width and 100 μm depth using a 20 V drive, when the resonant frequency of the cantilever is matched to the frequency response of the electrothermal transducer. Experimental data are compared with a simple model, and variables affecting the quality factor are discussed. The actuators are shown to be suitable for use in optical scanning systems based on moving waveguides." @default.
- W2044822040 created "2016-06-24" @default.
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- W2044822040 date "2002-03-22" @default.
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- W2044822040 title "Long-travel electrothermally driven resonant cantilever microactuators" @default.
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- W2044822040 doi "https://doi.org/10.1088/0960-1317/12/3/304" @default.
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