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• W2044843445 endingPage "20" @default.
• W2044843445 startingPage "16" @default.
• W2044843445 abstract "We have studied the crystallization process of HfO2 and HfAlOx films using grazing incidence X-ray diffraction (GIXRD) with synchrotron radiation. The HfO2 and HfAlOx films were grown by atomic layer deposition (ALD) on a chemical SiO2 interfacial layer. X-ray diffraction (XRD) patterns of the HfO2 film as-deposited contain not only the monoclinic phase but also the orthorhombic or tetragonal phase. With increasing annealing temperature, the orthorhombic or tetragonal phase decreases and disappears. The HfAlOx film crystallized after annealing at 900 °C. The crystallographic phase was the cubic phase of CaF2 type." @default.
• W2044843445 created "2016-06-24" @default.
• W2044843445 creator A5004550739 @default.
• W2044843445 creator A5015924348 @default.
• W2044843445 creator A5032120684 @default.
• W2044843445 creator A5033762025 @default.
• W2044843445 creator A5038076438 @default.
• W2044843445 creator A5038984650 @default.
• W2044843445 creator A5039028952 @default.
• W2044843445 creator A5043208342 @default.
• W2044843445 creator A5056016328 @default.
• W2044843445 creator A5070528860 @default.
• W2044843445 creator A5088836639 @default.
• W2044843445 date "2005-05-01" @default.
• W2044843445 modified "2023-10-16" @default.
• W2044843445 title "Crystallization process of high-k gate dielectrics studied by surface X-ray diffraction" @default.
• W2044843445 cites W2000915085 @default.
• W2044843445 cites W2003645630 @default.
• W2044843445 cites W2019017977 @default.
• W2044843445 cites W2042662532 @default.
• W2044843445 cites W2068554424 @default.
• W2044843445 cites W2083441930 @default.
• W2044843445 doi "https://doi.org/10.1016/j.apsusc.2004.09.124" @default.
• W2044843445 hasPublicationYear "2005" @default.
• W2044843445 type Work @default.
• W2044843445 sameAs 2044843445 @default.
• W2044843445 citedByCount "17" @default.
• W2044843445 countsByYear W20448434452012 @default.
• W2044843445 countsByYear W20448434452013 @default.
• W2044843445 countsByYear W20448434452015 @default.
• W2044843445 countsByYear W20448434452021 @default.
• W2044843445 crossrefType "journal-article" @default.
• W2044843445 hasAuthorship W2044843445A5004550739 @default.
• W2044843445 hasAuthorship W2044843445A5015924348 @default.
• W2044843445 hasAuthorship W2044843445A5032120684 @default.
• W2044843445 hasAuthorship W2044843445A5033762025 @default.
• W2044843445 hasAuthorship W2044843445A5038076438 @default.
• W2044843445 hasAuthorship W2044843445A5038984650 @default.
• W2044843445 hasAuthorship W2044843445A5039028952 @default.
• W2044843445 hasAuthorship W2044843445A5043208342 @default.
• W2044843445 hasAuthorship W2044843445A5056016328 @default.
• W2044843445 hasAuthorship W2044843445A5070528860 @default.
• W2044843445 hasAuthorship W2044843445A5088836639 @default.
• W2044843445 hasConcept C113196181 @default.
• W2044843445 hasConcept C115624301 @default.
• W2044843445 hasConcept C120665830 @default.
• W2044843445 hasConcept C121332964 @default.
• W2044843445 hasConcept C133386390 @default.
• W2044843445 hasConcept C16332341 @default.
• W2044843445 hasConcept C170751736 @default.
• W2044843445 hasConcept C171250308 @default.
• W2044843445 hasConcept C178790620 @default.
• W2044843445 hasConcept C185592680 @default.
• W2044843445 hasConcept C19067145 @default.
• W2044843445 hasConcept C191897082 @default.
• W2044843445 hasConcept C192562407 @default.
• W2044843445 hasConcept C203036418 @default.
• W2044843445 hasConcept C207114421 @default.
• W2044843445 hasConcept C2777855556 @default.
• W2044843445 hasConcept C37243968 @default.
• W2044843445 hasConcept C43617362 @default.
• W2044843445 hasConcept C44280652 @default.
• W2044843445 hasConcept C49040817 @default.
• W2044843445 hasConcept C50515024 @default.
• W2044843445 hasConcept C61276311 @default.
• W2044843445 hasConcept C69544855 @default.
• W2044843445 hasConcept C8010536 @default.
• W2044843445 hasConceptScore W2044843445C113196181 @default.
• W2044843445 hasConceptScore W2044843445C115624301 @default.
• W2044843445 hasConceptScore W2044843445C120665830 @default.
• W2044843445 hasConceptScore W2044843445C121332964 @default.
• W2044843445 hasConceptScore W2044843445C133386390 @default.
• W2044843445 hasConceptScore W2044843445C16332341 @default.
• W2044843445 hasConceptScore W2044843445C170751736 @default.
• W2044843445 hasConceptScore W2044843445C171250308 @default.
• W2044843445 hasConceptScore W2044843445C178790620 @default.
• W2044843445 hasConceptScore W2044843445C185592680 @default.
• W2044843445 hasConceptScore W2044843445C19067145 @default.
• W2044843445 hasConceptScore W2044843445C191897082 @default.
• W2044843445 hasConceptScore W2044843445C192562407 @default.
• W2044843445 hasConceptScore W2044843445C203036418 @default.
• W2044843445 hasConceptScore W2044843445C207114421 @default.
• W2044843445 hasConceptScore W2044843445C2777855556 @default.
• W2044843445 hasConceptScore W2044843445C37243968 @default.
• W2044843445 hasConceptScore W2044843445C43617362 @default.
• W2044843445 hasConceptScore W2044843445C44280652 @default.
• W2044843445 hasConceptScore W2044843445C49040817 @default.
• W2044843445 hasConceptScore W2044843445C50515024 @default.
• W2044843445 hasConceptScore W2044843445C61276311 @default.
• W2044843445 hasConceptScore W2044843445C69544855 @default.
• W2044843445 hasConceptScore W2044843445C8010536 @default.
• W2044843445 hasFunder F4320320912 @default.
• W2044843445 hasFunder F4320321034 @default.
• W2044843445 hasIssue "1-4" @default.
• W2044843445 hasLocation W20448434451 @default.
• W2044843445 hasOpenAccess W2044843445 @default.
• W2044843445 hasPrimaryLocation W20448434451 @default.
• W2044843445 hasRelatedWork W2011902714 @default.

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