FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2044854911> ?p ?o ?g. }

• W2044854911 endingPage "572" @default.
• W2044854911 startingPage "566" @default.
• W2044854911 abstract "Initial growth stage of 3C-SiC, which was initiated by exposing a Si(001)-(2×1) surface to dimethylsilane (DMSi) at substrate temperature 650−750oC, was observed in situ using reflection high-energy electron diffraction (RHEED). From the observation of RHEED patterns, 3C-SiC spots appeared after incubation time (IT). During IT, Si(001)-c(4×4) structure was also observed. These changes were similar to the case using cracked propane. Therefore, it is considered that the carbon atoms from adsorbed DMSi molecules diffused into the Si substrate and formed Si1-xCx alloys in oder to relax the lattice mismatch between Si and 3C-SiC during IT. The activation energy calculated from the Arrhenius plot on the initial growth rate of 3C-SiC formation was close to that for hydrogen desorption from Si surface. The hydrogen atoms of DMSi molecules adsorbed on the surface transferred to the dangling bonds and afterwards they desorbed from Si-H bonds on the surface. The hydrogen desorption process is considered to be rate-limitting step." @default.
• W2044854911 created "2016-06-24" @default.
• W2044854911 creator A5032044936 @default.
• W2044854911 creator A5032163283 @default.
• W2044854911 creator A5089214931 @default.
• W2044854911 date "2001-01-01" @default.
• W2044854911 modified "2023-09-23" @default.
• W2044854911 title "Initial Stage of SiC Growth on Si Surface Using Dimethylsilane." @default.
• W2044854911 cites W1669492912 @default.
• W2044854911 cites W1678574344 @default.
• W2044854911 cites W1992432383 @default.
• W2044854911 cites W1994639109 @default.
• W2044854911 cites W1997240195 @default.
• W2044854911 cites W2001197455 @default.
• W2044854911 cites W2009275753 @default.
• W2044854911 cites W2010631335 @default.
• W2044854911 cites W2015835824 @default.
• W2044854911 cites W2025967636 @default.
• W2044854911 cites W2030922073 @default.
• W2044854911 cites W2046858081 @default.
• W2044854911 cites W2048803855 @default.
• W2044854911 cites W2059557936 @default.
• W2044854911 cites W2062040872 @default.
• W2044854911 cites W2069265478 @default.
• W2044854911 cites W2072782757 @default.
• W2044854911 cites W2086783677 @default.
• W2044854911 cites W2091375430 @default.
• W2044854911 cites W2384171554 @default.
• W2044854911 cites W4255941110 @default.
• W2044854911 doi "https://doi.org/10.1380/jsssj.22.566" @default.
• W2044854911 hasPublicationYear "2001" @default.
• W2044854911 type Work @default.
• W2044854911 sameAs 2044854911 @default.
• W2044854911 citedByCount "1" @default.
• W2044854911 crossrefType "journal-article" @default.
• W2044854911 hasAuthorship W2044854911A5032044936 @default.
• W2044854911 hasAuthorship W2044854911A5032163283 @default.
• W2044854911 hasAuthorship W2044854911A5089214931 @default.
• W2044854911 hasBestOaLocation W20448549111 @default.
• W2044854911 hasConcept C110738630 @default.
• W2044854911 hasConcept C111368507 @default.
• W2044854911 hasConcept C113196181 @default.
• W2044854911 hasConcept C120665830 @default.
• W2044854911 hasConcept C121332964 @default.
• W2044854911 hasConcept C127313418 @default.
• W2044854911 hasConcept C147789679 @default.
• W2044854911 hasConcept C150394285 @default.
• W2044854911 hasConcept C162711632 @default.
• W2044854911 hasConcept C171250308 @default.
• W2044854911 hasConcept C178790620 @default.
• W2044854911 hasConcept C185592680 @default.
• W2044854911 hasConcept C188027245 @default.
• W2044854911 hasConcept C191897082 @default.
• W2044854911 hasConcept C192562407 @default.
• W2044854911 hasConcept C200096950 @default.
• W2044854911 hasConcept C207114421 @default.
• W2044854911 hasConcept C2777289219 @default.
• W2044854911 hasConcept C2779227376 @default.
• W2044854911 hasConcept C2779342513 @default.
• W2044854911 hasConcept C32424582 @default.
• W2044854911 hasConcept C43617362 @default.
• W2044854911 hasConcept C512968161 @default.
• W2044854911 hasConcept C544956773 @default.
• W2044854911 hasConcept C77557913 @default.
• W2044854911 hasConcept C8010536 @default.
• W2044854911 hasConcept C8739425 @default.
• W2044854911 hasConcept C95121573 @default.
• W2044854911 hasConceptScore W2044854911C110738630 @default.
• W2044854911 hasConceptScore W2044854911C111368507 @default.
• W2044854911 hasConceptScore W2044854911C113196181 @default.
• W2044854911 hasConceptScore W2044854911C120665830 @default.
• W2044854911 hasConceptScore W2044854911C121332964 @default.
• W2044854911 hasConceptScore W2044854911C127313418 @default.
• W2044854911 hasConceptScore W2044854911C147789679 @default.
• W2044854911 hasConceptScore W2044854911C150394285 @default.
• W2044854911 hasConceptScore W2044854911C162711632 @default.
• W2044854911 hasConceptScore W2044854911C171250308 @default.
• W2044854911 hasConceptScore W2044854911C178790620 @default.
• W2044854911 hasConceptScore W2044854911C185592680 @default.
• W2044854911 hasConceptScore W2044854911C188027245 @default.
• W2044854911 hasConceptScore W2044854911C191897082 @default.
• W2044854911 hasConceptScore W2044854911C192562407 @default.
• W2044854911 hasConceptScore W2044854911C200096950 @default.
• W2044854911 hasConceptScore W2044854911C207114421 @default.
• W2044854911 hasConceptScore W2044854911C2777289219 @default.
• W2044854911 hasConceptScore W2044854911C2779227376 @default.
• W2044854911 hasConceptScore W2044854911C2779342513 @default.
• W2044854911 hasConceptScore W2044854911C32424582 @default.
• W2044854911 hasConceptScore W2044854911C43617362 @default.
• W2044854911 hasConceptScore W2044854911C512968161 @default.
• W2044854911 hasConceptScore W2044854911C544956773 @default.
• W2044854911 hasConceptScore W2044854911C77557913 @default.
• W2044854911 hasConceptScore W2044854911C8010536 @default.
• W2044854911 hasConceptScore W2044854911C8739425 @default.
• W2044854911 hasConceptScore W2044854911C95121573 @default.
• W2044854911 hasIssue "9" @default.
• W2044854911 hasLocation W20448549111 @default.
• W2044854911 hasOpenAccess W2044854911 @default.

• next