Matches in SemOpenAlex for { <https://semopenalex.org/work/W2044861736> ?p ?o ?g. }
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96
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- W2044861736 endingPage "608" @default.
- W2044861736 startingPage "603" @default.
- W2044861736 abstract "We report on electron holography as a promising candidate for diagnostics in silicon technology and research. Electron holography determines the local phase shift of the electron wave passing through a sample. The phase is proportional to the 2D projected electrostatic potential in the sample and thus reveals p-n junctions and, indirectly, doping. We demonstrate detection of submonolayer boron layers in Si and SiGe, measurement of Ge concentration in SiGe and qualitative 2D oxygen mapping in SiO2/Si structures with 0.5 nm resolution, and comparison of doping in two bipolar transistors with different base implant. Resolution and noise limits are discussed." @default.
- W2044861736 created "2016-06-24" @default.
- W2044861736 creator A5019819814 @default.
- W2044861736 creator A5020782403 @default.
- W2044861736 date "2005-12-01" @default.
- W2044861736 modified "2023-09-23" @default.
- W2044861736 title "Potential and Limitations of Electron Holography in Silicon Research" @default.
- W2044861736 cites W1623027047 @default.
- W2044861736 cites W1995170158 @default.
- W2044861736 cites W1999683639 @default.
- W2044861736 cites W1999899203 @default.
- W2044861736 cites W2014398625 @default.
- W2044861736 cites W2030869830 @default.
- W2044861736 cites W2031673733 @default.
- W2044861736 cites W2048353977 @default.
- W2044861736 cites W2048547443 @default.
- W2044861736 cites W2067602281 @default.
- W2044861736 cites W2083702748 @default.
- W2044861736 cites W2121165716 @default.
- W2044861736 cites W2172263930 @default.
- W2044861736 doi "https://doi.org/10.4028/www.scientific.net/ssp.108-109.603" @default.
- W2044861736 hasPublicationYear "2005" @default.
- W2044861736 type Work @default.
- W2044861736 sameAs 2044861736 @default.
- W2044861736 citedByCount "4" @default.
- W2044861736 countsByYear W20448617362013 @default.
- W2044861736 countsByYear W20448617362016 @default.
- W2044861736 crossrefType "journal-article" @default.
- W2044861736 hasAuthorship W2044861736A5019819814 @default.
- W2044861736 hasAuthorship W2044861736A5020782403 @default.
- W2044861736 hasConcept C108225325 @default.
- W2044861736 hasConcept C119599485 @default.
- W2044861736 hasConcept C120665830 @default.
- W2044861736 hasConcept C121332964 @default.
- W2044861736 hasConcept C127413603 @default.
- W2044861736 hasConcept C138268822 @default.
- W2044861736 hasConcept C146088050 @default.
- W2044861736 hasConcept C147120987 @default.
- W2044861736 hasConcept C154945302 @default.
- W2044861736 hasConcept C165801399 @default.
- W2044861736 hasConcept C171250308 @default.
- W2044861736 hasConcept C172385210 @default.
- W2044861736 hasConcept C185544564 @default.
- W2044861736 hasConcept C187590223 @default.
- W2044861736 hasConcept C192562407 @default.
- W2044861736 hasConcept C2776451378 @default.
- W2044861736 hasConcept C41008148 @default.
- W2044861736 hasConcept C44280652 @default.
- W2044861736 hasConcept C49040817 @default.
- W2044861736 hasConcept C501308230 @default.
- W2044861736 hasConcept C544956773 @default.
- W2044861736 hasConcept C57863236 @default.
- W2044861736 hasConcept C62520636 @default.
- W2044861736 hasConceptScore W2044861736C108225325 @default.
- W2044861736 hasConceptScore W2044861736C119599485 @default.
- W2044861736 hasConceptScore W2044861736C120665830 @default.
- W2044861736 hasConceptScore W2044861736C121332964 @default.
- W2044861736 hasConceptScore W2044861736C127413603 @default.
- W2044861736 hasConceptScore W2044861736C138268822 @default.
- W2044861736 hasConceptScore W2044861736C146088050 @default.
- W2044861736 hasConceptScore W2044861736C147120987 @default.
- W2044861736 hasConceptScore W2044861736C154945302 @default.
- W2044861736 hasConceptScore W2044861736C165801399 @default.
- W2044861736 hasConceptScore W2044861736C171250308 @default.
- W2044861736 hasConceptScore W2044861736C172385210 @default.
- W2044861736 hasConceptScore W2044861736C185544564 @default.
- W2044861736 hasConceptScore W2044861736C187590223 @default.
- W2044861736 hasConceptScore W2044861736C192562407 @default.
- W2044861736 hasConceptScore W2044861736C2776451378 @default.
- W2044861736 hasConceptScore W2044861736C41008148 @default.
- W2044861736 hasConceptScore W2044861736C44280652 @default.
- W2044861736 hasConceptScore W2044861736C49040817 @default.
- W2044861736 hasConceptScore W2044861736C501308230 @default.
- W2044861736 hasConceptScore W2044861736C544956773 @default.
- W2044861736 hasConceptScore W2044861736C57863236 @default.
- W2044861736 hasConceptScore W2044861736C62520636 @default.
- W2044861736 hasLocation W20448617361 @default.
- W2044861736 hasOpenAccess W2044861736 @default.
- W2044861736 hasPrimaryLocation W20448617361 @default.
- W2044861736 hasRelatedWork W1828754855 @default.
- W2044861736 hasRelatedWork W2033669323 @default.
- W2044861736 hasRelatedWork W2039395868 @default.
- W2044861736 hasRelatedWork W2080263074 @default.
- W2044861736 hasRelatedWork W2134049835 @default.
- W2044861736 hasRelatedWork W2244219204 @default.
- W2044861736 hasRelatedWork W3040456536 @default.
- W2044861736 hasRelatedWork W4229531658 @default.
- W2044861736 hasRelatedWork W2098052754 @default.
- W2044861736 hasRelatedWork W2501691810 @default.
- W2044861736 hasVolume "108-109" @default.
- W2044861736 isParatext "false" @default.
- W2044861736 isRetracted "false" @default.
- W2044861736 magId "2044861736" @default.
- W2044861736 workType "article" @default.