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- W2044876757 abstract "In via-first and via-mid TSV integration flows, Si must be removed from the backside of the wafer to make contact with the bottom of the TSVs. This operation is performed using a mechanical grind followed by a reveal etch. We show the results of TSV reveal using both a wet and dry etch. A set of measurements is performed on the TSV wafers and the bonded stack to select etch parameters to achieve the desired TSV reveal height after the etch. We show that even extremely tight process control of the TSV etch, wafer grind, bond layer, carrier wafer thickness, and thinning etch will occasionally produce via heights that vary too much across the wafer and wafer to wafer. A CMP process is proposed that makes the thinning process simpler." @default.
- W2044876757 created "2016-06-24" @default.
- W2044876757 creator A5064250338 @default.
- W2044876757 creator A5084920370 @default.
- W2044876757 date "2012-01-01" @default.
- W2044876757 modified "2023-09-23" @default.
- W2044876757 title "TSV reveal etch for 3D integration" @default.
- W2044876757 cites W2102665402 @default.
- W2044876757 cites W2106469776 @default.
- W2044876757 cites W2165769044 @default.
- W2044876757 doi "https://doi.org/10.1109/3dic.2012.6262987" @default.
- W2044876757 hasPublicationYear "2012" @default.
- W2044876757 type Work @default.
- W2044876757 sameAs 2044876757 @default.
- W2044876757 citedByCount "26" @default.
- W2044876757 countsByYear W20448767572013 @default.
- W2044876757 countsByYear W20448767572014 @default.
- W2044876757 countsByYear W20448767572015 @default.
- W2044876757 countsByYear W20448767572016 @default.
- W2044876757 crossrefType "proceedings-article" @default.
- W2044876757 hasAuthorship W2044876757A5064250338 @default.
- W2044876757 hasAuthorship W2044876757A5084920370 @default.
- W2044876757 hasConcept C100460472 @default.
- W2044876757 hasConcept C111919701 @default.
- W2044876757 hasConcept C127413603 @default.
- W2044876757 hasConcept C159985019 @default.
- W2044876757 hasConcept C160671074 @default.
- W2044876757 hasConcept C18903297 @default.
- W2044876757 hasConcept C192562407 @default.
- W2044876757 hasConcept C199360897 @default.
- W2044876757 hasConcept C24326235 @default.
- W2044876757 hasConcept C2777571299 @default.
- W2044876757 hasConcept C2778638305 @default.
- W2044876757 hasConcept C2779133538 @default.
- W2044876757 hasConcept C2779201687 @default.
- W2044876757 hasConcept C2779227376 @default.
- W2044876757 hasConcept C2781353100 @default.
- W2044876757 hasConcept C41008148 @default.
- W2044876757 hasConcept C49040817 @default.
- W2044876757 hasConcept C86803240 @default.
- W2044876757 hasConcept C9395851 @default.
- W2044876757 hasConcept C98045186 @default.
- W2044876757 hasConceptScore W2044876757C100460472 @default.
- W2044876757 hasConceptScore W2044876757C111919701 @default.
- W2044876757 hasConceptScore W2044876757C127413603 @default.
- W2044876757 hasConceptScore W2044876757C159985019 @default.
- W2044876757 hasConceptScore W2044876757C160671074 @default.
- W2044876757 hasConceptScore W2044876757C18903297 @default.
- W2044876757 hasConceptScore W2044876757C192562407 @default.
- W2044876757 hasConceptScore W2044876757C199360897 @default.
- W2044876757 hasConceptScore W2044876757C24326235 @default.
- W2044876757 hasConceptScore W2044876757C2777571299 @default.
- W2044876757 hasConceptScore W2044876757C2778638305 @default.
- W2044876757 hasConceptScore W2044876757C2779133538 @default.
- W2044876757 hasConceptScore W2044876757C2779201687 @default.
- W2044876757 hasConceptScore W2044876757C2779227376 @default.
- W2044876757 hasConceptScore W2044876757C2781353100 @default.
- W2044876757 hasConceptScore W2044876757C41008148 @default.
- W2044876757 hasConceptScore W2044876757C49040817 @default.
- W2044876757 hasConceptScore W2044876757C86803240 @default.
- W2044876757 hasConceptScore W2044876757C9395851 @default.
- W2044876757 hasConceptScore W2044876757C98045186 @default.
- W2044876757 hasLocation W20448767571 @default.
- W2044876757 hasOpenAccess W2044876757 @default.
- W2044876757 hasPrimaryLocation W20448767571 @default.
- W2044876757 hasRelatedWork W1964908672 @default.
- W2044876757 hasRelatedWork W2026314627 @default.
- W2044876757 hasRelatedWork W2044876757 @default.
- W2044876757 hasRelatedWork W2079104351 @default.
- W2044876757 hasRelatedWork W2101661303 @default.
- W2044876757 hasRelatedWork W2127455146 @default.
- W2044876757 hasRelatedWork W2153160607 @default.
- W2044876757 hasRelatedWork W2385271954 @default.
- W2044876757 hasRelatedWork W2887841772 @default.
- W2044876757 hasRelatedWork W3176348506 @default.
- W2044876757 isParatext "false" @default.
- W2044876757 isRetracted "false" @default.
- W2044876757 magId "2044876757" @default.
- W2044876757 workType "article" @default.