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• W2044936289 abstract "The hierarchical pattern formation with three stages, that is, (1) film-thickness topography, (2) fractal or concentric-ring pattern, and (3) cone morphology at micron or sub-micrometer order, was found here for the first time in the BN films prepared by plasma CVD assisted with pulsed excimer laser irradiation at 193 nm. The detailed topography consisting of unevenness in the film-thickness was obtained owing to the two-dimensional X-ray diffraction (2D-XRD) mapping method using a collimated X-ray of 0.1 mm in the diameter, where very high sensitivity was realized by selecting the X-ray from the substrate material, that was exponentially attenuated through the absorption from the film material according to Beer’s law. The important roles of the etching reactions in this process were experimentally verified here for the first time due to the 2D-mapping method. The formation mechanism of the hierarchical patterns was discussed." @default.
• W2044936289 created "2016-06-24" @default.
• W2044936289 creator A5026098035 @default.
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• W2044936289 date "2013-12-30" @default.
• W2044936289 modified "2023-09-25" @default.
• W2044936289 title "Self-organized formation of hierarchically-ordered structures in laser-activated plasma CVD of sp³-bonded BN films" @default.
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• W2044936289 doi "https://doi.org/10.7567/jjap.53.010202" @default.
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