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- W2045038513 abstract "An rms measurement repeatability of </=0.07 nm and a reproducibility of </=0.16 are reported from a series of thickness measurements made on a 280 microm thick, 37.5 mm diameter lithium niobate wafer. The measurements were taken on a custom made metrology rig based on accurate rotation of a Fabry-Perot etalon structure in a collimated beam from a wavelength stabilized Helium Neon laser. The measurements were made on different days with the wafer in three different orientations." @default.
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- W2045038513 date "2006-01-01" @default.
- W2045038513 modified "2023-10-08" @default.
- W2045038513 title "Sub-nanometer metrology of optical wafers using an angle-scanned Fabry-Perot interferometer" @default.
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- W2045038513 doi "https://doi.org/10.1364/opex.14.000114" @default.
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