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- W2045127564 abstract "Abstract Ion bombardment modification of solid surfaces has long been academic and technological interest. Epi-ready Ge (111) and (100) surfaces were implanted with 40 to 200 keV germanium (Ge), cobalt (Co), and iron (Fe) ions at the dose of 1015 to 5×1017 ions/cm2. Cellular nanostructures were observed by scanning probe microscopy (SPM), including scanning tunnelling microscopy (STM), and contact-mode and tapping-mode atomic force microscopy (AFM). These structures are similar (at higher resolution) to those reported in earlier scanning electron microscope (SEM) measurements (I.H. Wilson, J. Appl. Phys., 53 (1982) 1698). In the case of Co-implanted Ge(111), the variation of the root-mean-square roughness (Rq) with ion dose (1016 to 1017 ions/cm2), accelerating voltage (40 to 70 kV) and mean beam current density (15 to 150 μA/cm2) is presented and explained in terms of ion range and surface temperature. Finally, the effect of the tip shape in the AFM images presented in this paper is discussed." @default.
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- W2045127564 date "1997-10-01" @default.
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- W2045127564 title "A study of ion-bombarded nanostructures on germanium surfaces by scanning probe microscopy" @default.
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- W2045127564 doi "https://doi.org/10.1016/s0040-6090(97)00596-8" @default.
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