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• W2045171071 abstract "Anisotropic etching, enabled by energetic ion bombardment, is one of the primary roles of plasma–assisted materials processing for microelectronics fabrication. One challenge in plasma etching is being able to control the ion energy-angular distributions (IEADs) from the presheath to the surface of the wafer which is necessary for maintaining the critical dimension of features. Dual frequency capacitive coupled plasmas (DF-CCPs) potentially provide flexible control of IEADs, providing high selectivity while etching different materials and improved uniformity across the wafer. In this paper, the authors present a computational investigation of customizing and controlling IEADs in a DF-CCP resembling those industrially employed with both biases applied to the substrate holding the wafer. The authors found that the ratio of the low-frequency to high-frequency power can be used to control the plasma density, provide extra control for the angular width and energy of the IEADs, and to optimize etch profiles. If the phases between the low frequency and its higher harmonics are changed, the sheath dynamics are modulated, which in turn produces modulation in the ion energy distribution. With these trends, continuously varying the phases between the dual-frequencies can smooth the high frequency modulation in the time averaged IEADs. For validation, results from the simulation are compared with Langmuir probe measurements of ion saturation current densities in a DF-CCP." @default.
• W2045171071 created "2016-06-24" @default.
• W2045171071 creator A5009306289 @default.
• W2045171071 creator A5055757851 @default.
• W2045171071 creator A5067498145 @default.
• W2045171071 creator A5067742323 @default.
• W2045171071 creator A5075319938 @default.
• W2045171071 creator A5083484684 @default.
• W2045171071 date "2015-03-24" @default.
• W2045171071 modified "2023-09-27" @default.
• W2045171071 title "Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles" @default.
• W2045171071 cites W1518204862 @default.
• W2045171071 cites W1969852806 @default.
• W2045171071 cites W1987600079 @default.
• W2045171071 cites W1988176332 @default.
• W2045171071 cites W2000172671 @default.
• W2045171071 cites W2008464274 @default.
• W2045171071 cites W2010741193 @default.
• W2045171071 cites W2020276185 @default.
• W2045171071 cites W2031688765 @default.
• W2045171071 cites W2038030990 @default.
• W2045171071 cites W2039574057 @default.
• W2045171071 cites W2041009400 @default.
• W2045171071 cites W2057543557 @default.
• W2045171071 cites W2060600644 @default.
• W2045171071 cites W2076979667 @default.
• W2045171071 cites W2077617665 @default.
• W2045171071 cites W2080144813 @default.
• W2045171071 cites W2085456433 @default.
• W2045171071 cites W2087013422 @default.
• W2045171071 cites W2087846290 @default.
• W2045171071 cites W2091879134 @default.
• W2045171071 cites W2094638903 @default.
• W2045171071 cites W2098997637 @default.
• W2045171071 cites W2101144934 @default.
• W2045171071 cites W2108149579 @default.
• W2045171071 cites W2117463812 @default.
• W2045171071 cites W2136937054 @default.
• W2045171071 cites W2152122174 @default.
• W2045171071 cites W2171206964 @default.
• W2045171071 doi "https://doi.org/10.1116/1.4915248" @default.
• W2045171071 hasPublicationYear "2015" @default.
• W2045171071 type Work @default.
• W2045171071 sameAs 2045171071 @default.
• W2045171071 citedByCount "31" @default.
• W2045171071 countsByYear W20451710712015 @default.
• W2045171071 countsByYear W20451710712016 @default.
• W2045171071 countsByYear W20451710712017 @default.
• W2045171071 countsByYear W20451710712018 @default.
• W2045171071 countsByYear W20451710712019 @default.
• W2045171071 countsByYear W20451710712020 @default.
• W2045171071 countsByYear W20451710712021 @default.
• W2045171071 countsByYear W20451710712022 @default.
• W2045171071 countsByYear W20451710712023 @default.
• W2045171071 crossrefType "journal-article" @default.
• W2045171071 hasAuthorship W2045171071A5009306289 @default.
• W2045171071 hasAuthorship W2045171071A5055757851 @default.
• W2045171071 hasAuthorship W2045171071A5067498145 @default.
• W2045171071 hasAuthorship W2045171071A5067742323 @default.
• W2045171071 hasAuthorship W2045171071A5075319938 @default.
• W2045171071 hasAuthorship W2045171071A5083484684 @default.
• W2045171071 hasConcept C100460472 @default.
• W2045171071 hasConcept C107187091 @default.
• W2045171071 hasConcept C119599485 @default.
• W2045171071 hasConcept C121332964 @default.
• W2045171071 hasConcept C127413603 @default.
• W2045171071 hasConcept C130472188 @default.
• W2045171071 hasConcept C145148216 @default.
• W2045171071 hasConcept C155891486 @default.
• W2045171071 hasConcept C160671074 @default.
• W2045171071 hasConcept C165801399 @default.
• W2045171071 hasConcept C171250308 @default.
• W2045171071 hasConcept C176118016 @default.
• W2045171071 hasConcept C178790620 @default.
• W2045171071 hasConcept C185592680 @default.
• W2045171071 hasConcept C187937830 @default.
• W2045171071 hasConcept C188414643 @default.
• W2045171071 hasConcept C192562407 @default.
• W2045171071 hasConcept C2779227376 @default.
• W2045171071 hasConcept C30475298 @default.
• W2045171071 hasConcept C43503373 @default.
• W2045171071 hasConcept C49040817 @default.
• W2045171071 hasConcept C62520636 @default.
• W2045171071 hasConcept C68687820 @default.
• W2045171071 hasConcept C82706917 @default.
• W2045171071 hasConcept C95974651 @default.
• W2045171071 hasConceptScore W2045171071C100460472 @default.
• W2045171071 hasConceptScore W2045171071C107187091 @default.
• W2045171071 hasConceptScore W2045171071C119599485 @default.
• W2045171071 hasConceptScore W2045171071C121332964 @default.
• W2045171071 hasConceptScore W2045171071C127413603 @default.
• W2045171071 hasConceptScore W2045171071C130472188 @default.
• W2045171071 hasConceptScore W2045171071C145148216 @default.
• W2045171071 hasConceptScore W2045171071C155891486 @default.
• W2045171071 hasConceptScore W2045171071C160671074 @default.
• W2045171071 hasConceptScore W2045171071C165801399 @default.
• W2045171071 hasConceptScore W2045171071C171250308 @default.
• W2045171071 hasConceptScore W2045171071C176118016 @default.
• W2045171071 hasConceptScore W2045171071C178790620 @default.
• W2045171071 hasConceptScore W2045171071C185592680 @default.

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