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• W2045190022 abstract "A 300-mm-aperture digital phase-shifting Fizeau interferometer has been developed in-house for precision metrology of optical components fabricated by the optical workshop at Telecommunications and Industrial Physics, Commonwealth Scientific and Industrial Research Organization. We describe the procedures used in the calibration of the instrument. A reference data file representing the deviations from flatness of the reference surface is generated, measurement uncertainty estimated, and aberrations in the instrument assessed. Measurements on 250-mm-diameter uncoated optical surfaces have consistently shown short-term repeatability of 0.3-nm rms from measurement to measurement and allowed for absolute characterization of these surfaces to within a few nanometers." @default.
• W2045190022 created "2016-06-24" @default.
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• W2045190022 date "2000-10-01" @default.
• W2045190022 modified "2023-10-07" @default.
• W2045190022 title "Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer" @default.
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• W2045190022 doi "https://doi.org/10.1364/ao.39.005161" @default.
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