FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2045200051> ?p ?o ?g. }

• W2045200051 endingPage "1469" @default.
• W2045200051 startingPage "1463" @default.
• W2045200051 abstract "Hydrogenated microcrystalline silicon thin films can be deposited at low substrate temperatures using plasma enhanced–or hot wire–chemical vapor deposition using silane, reactive magnetron sputtering of silicon, or related techniques. Microcrystalline silicon is deposited when a large quantity of molecular hydrogen is added to the process gas such that a large flux of atomic hydrogen impinges on the film growth surface; otherwise, the films are amorphous. Three different microscopic mechanisms have been hypothesized to explain the formation of the microcrystalline phase. In essence, the hypotheses are that atomic hydrogen: (i) enhances the surface diffusion of Si adspecies, which in turn raises the probability of crystalline phase formation, (ii) promotes a subsurface transformation of amorphous into microcrystalline Si, or (iii) preferentially etches amorphous regions such that only microcrystalline Si survives to produce film growth. In this work, we critically test mechanism (i) as follows. We deposit ..." @default.
• W2045200051 created "2016-06-24" @default.
• W2045200051 creator A5023649166 @default.
• W2045200051 creator A5047058288 @default.
• W2045200051 date "2001-01-15" @default.
• W2045200051 modified "2023-09-26" @default.
• W2045200051 title "Deposition of microcrystalline silicon: Direct evidence for hydrogen-induced surface mobility of Si adspecies" @default.
• W2045200051 cites W1964257362 @default.
• W2045200051 cites W1966924206 @default.
• W2045200051 cites W1968334454 @default.
• W2045200051 cites W1988639161 @default.
• W2045200051 cites W1991344782 @default.
• W2045200051 cites W1992352680 @default.
• W2045200051 cites W1992948853 @default.
• W2045200051 cites W1997740729 @default.
• W2045200051 cites W2004010097 @default.
• W2045200051 cites W2009556223 @default.
• W2045200051 cites W2014206557 @default.
• W2045200051 cites W2016387786 @default.
• W2045200051 cites W2017859291 @default.
• W2045200051 cites W2020296022 @default.
• W2045200051 cites W2025798905 @default.
• W2045200051 cites W2025886244 @default.
• W2045200051 cites W2032879093 @default.
• W2045200051 cites W2033518616 @default.
• W2045200051 cites W2036494571 @default.
• W2045200051 cites W2037784403 @default.
• W2045200051 cites W2040351271 @default.
• W2045200051 cites W2042705332 @default.
• W2045200051 cites W2045549011 @default.
• W2045200051 cites W2051568903 @default.
• W2045200051 cites W2055697571 @default.
• W2045200051 cites W2057321084 @default.
• W2045200051 cites W2059612189 @default.
• W2045200051 cites W2066558481 @default.
• W2045200051 cites W2069907632 @default.
• W2045200051 cites W2071110170 @default.
• W2045200051 cites W2072835235 @default.
• W2045200051 cites W2074576465 @default.
• W2045200051 cites W2077707466 @default.
• W2045200051 cites W2081842290 @default.
• W2045200051 cites W2082536881 @default.
• W2045200051 cites W2085703661 @default.
• W2045200051 cites W2087306436 @default.
• W2045200051 cites W2087343980 @default.
• W2045200051 cites W2092336017 @default.
• W2045200051 cites W2155814912 @default.
• W2045200051 cites W2162337814 @default.
• W2045200051 cites W2164894473 @default.
• W2045200051 doi "https://doi.org/10.1063/1.1334639" @default.
• W2045200051 hasPublicationYear "2001" @default.
• W2045200051 type Work @default.
• W2045200051 sameAs 2045200051 @default.
• W2045200051 citedByCount "49" @default.
• W2045200051 countsByYear W20452000512012 @default.
• W2045200051 countsByYear W20452000512014 @default.
• W2045200051 countsByYear W20452000512015 @default.
• W2045200051 countsByYear W20452000512016 @default.
• W2045200051 countsByYear W20452000512021 @default.
• W2045200051 countsByYear W20452000512023 @default.
• W2045200051 crossrefType "journal-article" @default.
• W2045200051 hasAuthorship W2045200051A5023649166 @default.
• W2045200051 hasAuthorship W2045200051A5047058288 @default.
• W2045200051 hasConcept C127313418 @default.
• W2045200051 hasConcept C127413603 @default.
• W2045200051 hasConcept C151730666 @default.
• W2045200051 hasConcept C171250308 @default.
• W2045200051 hasConcept C178790620 @default.
• W2045200051 hasConcept C185592680 @default.
• W2045200051 hasConcept C191897082 @default.
• W2045200051 hasConcept C192562407 @default.
• W2045200051 hasConcept C201370411 @default.
• W2045200051 hasConcept C2776390347 @default.
• W2045200051 hasConcept C2779667780 @default.
• W2045200051 hasConcept C2816523 @default.
• W2045200051 hasConcept C2993184922 @default.
• W2045200051 hasConcept C42360764 @default.
• W2045200051 hasConcept C512968161 @default.
• W2045200051 hasConcept C544956773 @default.
• W2045200051 hasConcept C64297162 @default.
• W2045200051 hasConcept C8010536 @default.
• W2045200051 hasConceptScore W2045200051C127313418 @default.
• W2045200051 hasConceptScore W2045200051C127413603 @default.
• W2045200051 hasConceptScore W2045200051C151730666 @default.
• W2045200051 hasConceptScore W2045200051C171250308 @default.
• W2045200051 hasConceptScore W2045200051C178790620 @default.
• W2045200051 hasConceptScore W2045200051C185592680 @default.
• W2045200051 hasConceptScore W2045200051C191897082 @default.
• W2045200051 hasConceptScore W2045200051C192562407 @default.
• W2045200051 hasConceptScore W2045200051C201370411 @default.
• W2045200051 hasConceptScore W2045200051C2776390347 @default.
• W2045200051 hasConceptScore W2045200051C2779667780 @default.
• W2045200051 hasConceptScore W2045200051C2816523 @default.
• W2045200051 hasConceptScore W2045200051C2993184922 @default.
• W2045200051 hasConceptScore W2045200051C42360764 @default.
• W2045200051 hasConceptScore W2045200051C512968161 @default.
• W2045200051 hasConceptScore W2045200051C544956773 @default.
• W2045200051 hasConceptScore W2045200051C64297162 @default.

• next