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- W2045216918 abstract "The structural properties of β-FeSi2 films grown on Si(111) are studied by means of several techniques. The films were grown in ultrahigh vacuum by solid phase epitaxy. The as-deposited Fe films were studied in situ by low energy electron diffraction (LEED) and Auger spectroscopy. Fe thicknesses were calibrated by Rutherford backscattering. The behavior of the FeMVV/SiLVV Auger peaks ratio intensity as a function of Fe thickness indicates a Stranski–Krastanov mode of growth. Annealing of the Fe layers at temperatures between 400 and 600 °C led to the β-FeSi2 formation. Sharp LEED patterns typical of the β-FeSi2 orthorhombic structure were obtained. X-ray double-crystal diffraction was carried out on a film about 200 Å thick in order to determine the lattice mismatch between the β-FeSi2 and the Si(111) planes accurately. The measured value of (2.1±0.1)×10−2 unambiguously indicates that (101) epitaxy takes place only on Si(111). No elastic strain of the overlayer was evident. The full width at half maximum of the overlayer diffraction peak indicates a good crystalline quality. An upper limit for mosaic spread was determined to be about 0.05°." @default.
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- W2045216918 date "1992-02-01" @default.
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- W2045216918 title "<i>In</i> <i>situ</i> and <i>ex</i> <i>situ</i> structural characterization of β-FeSi2 films epitaxially grown on Si(111)" @default.
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- W2045216918 doi "https://doi.org/10.1063/1.351292" @default.
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