Matches in SemOpenAlex for { <https://semopenalex.org/work/W2045266105> ?p ?o ?g. }
- W2045266105 endingPage "2503" @default.
- W2045266105 startingPage "2496" @default.
- W2045266105 abstract "Extreme ultraviolet (EUV) lithography requires photoresist materials that incorporate highly efficient photoacid generators (PAGs) due to the low intensity of the currently available EUV light sources. It is therefore necessary to understand the parameters that control acid generation mechanisms in photoresists under EUV irradiation, such as photoacid generator and base quencher structure, polymer matrix effects, and the interaction of ionizing radiation with the resist components. In this study, a known acid detection technique based on a dye indicator (coumarin 6) has been optimized for the quantification of the amount of photoacid produced by irradiation of lithographic resist films. Incorporation of acid-base indicators to solid polymer matrices has already been employed in previous studies; however, the environmental stability of the reactive species and the influence of the polymer resin have not been considered to date. Here, the authors present a comprehensive evaluation of PAGs that were exposed to 13.5nm radiation and compared to 248nm exposures. For some specific cases studied, it was possible to correlate the acid generation efficiency to the PAG structure and polymer matrix effects. Moreover, it is found that environmental effects such as humidity have a significant impact on acid strength, acid detection, and acid generation efficiency. The acid generation efficiency experiments were complemented with dose to clear exposures for selected resist systems. The results obtained indicate that the use of acid detection methods implemented for the design of EUV resist compositions with optimized photospeed requires careful attention to the complex role of the reactivity of all formulation components and photoreaction products in the presence of ionizing radiation." @default.
- W2045266105 created "2016-06-24" @default.
- W2045266105 creator A5014575728 @default.
- W2045266105 creator A5024710133 @default.
- W2045266105 creator A5047364570 @default.
- W2045266105 creator A5053836824 @default.
- W2045266105 creator A5062512501 @default.
- W2045266105 date "2007-11-01" @default.
- W2045266105 modified "2023-09-26" @default.
- W2045266105 title "Measurements of acid generation by extreme ultraviolet irradiation in lithographic films" @default.
- W2045266105 cites W1967080970 @default.
- W2045266105 cites W1967828814 @default.
- W2045266105 cites W1979812545 @default.
- W2045266105 cites W1988993440 @default.
- W2045266105 cites W1998510743 @default.
- W2045266105 cites W2000443839 @default.
- W2045266105 cites W2008364194 @default.
- W2045266105 cites W2009847797 @default.
- W2045266105 cites W2009921097 @default.
- W2045266105 cites W2011427720 @default.
- W2045266105 cites W2011677790 @default.
- W2045266105 cites W2011768212 @default.
- W2045266105 cites W2012716935 @default.
- W2045266105 cites W2016112831 @default.
- W2045266105 cites W2028856487 @default.
- W2045266105 cites W2031303251 @default.
- W2045266105 cites W2032467084 @default.
- W2045266105 cites W2038076296 @default.
- W2045266105 cites W2044097116 @default.
- W2045266105 cites W2049998961 @default.
- W2045266105 cites W2052439749 @default.
- W2045266105 cites W2062469427 @default.
- W2045266105 cites W2064240667 @default.
- W2045266105 cites W2066958391 @default.
- W2045266105 cites W2070327194 @default.
- W2045266105 cites W2075431805 @default.
- W2045266105 cites W2079316713 @default.
- W2045266105 cites W2080416894 @default.
- W2045266105 cites W2087648283 @default.
- W2045266105 cites W2121711324 @default.
- W2045266105 cites W2172253633 @default.
- W2045266105 cites W2315387429 @default.
- W2045266105 cites W2334800836 @default.
- W2045266105 cites W1999471108 @default.
- W2045266105 doi "https://doi.org/10.1116/1.2779045" @default.
- W2045266105 hasPublicationYear "2007" @default.
- W2045266105 type Work @default.
- W2045266105 sameAs 2045266105 @default.
- W2045266105 citedByCount "17" @default.
- W2045266105 countsByYear W20452661052012 @default.
- W2045266105 countsByYear W20452661052016 @default.
- W2045266105 countsByYear W20452661052021 @default.
- W2045266105 countsByYear W20452661052022 @default.
- W2045266105 crossrefType "journal-article" @default.
- W2045266105 hasAuthorship W2045266105A5014575728 @default.
- W2045266105 hasAuthorship W2045266105A5024710133 @default.
- W2045266105 hasAuthorship W2045266105A5047364570 @default.
- W2045266105 hasAuthorship W2045266105A5053836824 @default.
- W2045266105 hasAuthorship W2045266105A5062512501 @default.
- W2045266105 hasConcept C105487726 @default.
- W2045266105 hasConcept C111337013 @default.
- W2045266105 hasConcept C120665830 @default.
- W2045266105 hasConcept C121332964 @default.
- W2045266105 hasConcept C127413603 @default.
- W2045266105 hasConcept C134406635 @default.
- W2045266105 hasConcept C146024833 @default.
- W2045266105 hasConcept C159985019 @default.
- W2045266105 hasConcept C162996421 @default.
- W2045266105 hasConcept C171250308 @default.
- W2045266105 hasConcept C185544564 @default.
- W2045266105 hasConcept C185592680 @default.
- W2045266105 hasConcept C192562407 @default.
- W2045266105 hasConcept C204223013 @default.
- W2045266105 hasConcept C2776798109 @default.
- W2045266105 hasConcept C2779227376 @default.
- W2045266105 hasConcept C42360764 @default.
- W2045266105 hasConcept C49040817 @default.
- W2045266105 hasConcept C520434653 @default.
- W2045266105 hasConcept C521977710 @default.
- W2045266105 hasConcept C53524968 @default.
- W2045266105 hasConcept C75473681 @default.
- W2045266105 hasConceptScore W2045266105C105487726 @default.
- W2045266105 hasConceptScore W2045266105C111337013 @default.
- W2045266105 hasConceptScore W2045266105C120665830 @default.
- W2045266105 hasConceptScore W2045266105C121332964 @default.
- W2045266105 hasConceptScore W2045266105C127413603 @default.
- W2045266105 hasConceptScore W2045266105C134406635 @default.
- W2045266105 hasConceptScore W2045266105C146024833 @default.
- W2045266105 hasConceptScore W2045266105C159985019 @default.
- W2045266105 hasConceptScore W2045266105C162996421 @default.
- W2045266105 hasConceptScore W2045266105C171250308 @default.
- W2045266105 hasConceptScore W2045266105C185544564 @default.
- W2045266105 hasConceptScore W2045266105C185592680 @default.
- W2045266105 hasConceptScore W2045266105C192562407 @default.
- W2045266105 hasConceptScore W2045266105C204223013 @default.
- W2045266105 hasConceptScore W2045266105C2776798109 @default.
- W2045266105 hasConceptScore W2045266105C2779227376 @default.
- W2045266105 hasConceptScore W2045266105C42360764 @default.