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- W2045282693 abstract "The effects of gas-ambient and heat-treatment order on denuded zone formation in p 〈100〉 silicon wafers have been investigated. A model of silicon self-interestitial interaction with oxygen out-diffusion and precipitate growth is presented to explain the observed variations." @default.
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- W2045282693 title "Denuded zone formation in <i>p</i> 〈100〉 silicon" @default.
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- W2045282693 doi "https://doi.org/10.1063/1.333059" @default.
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