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- W2045298710 abstract "We have measured directly the diffusivity of interstitial oxygen in Sb-doped Czochralski silicon in the temperature range 750–1150 °C. Using secondary-ion mass spectroscopy of outdiffusion profiles, we show that the diffusivity is the same as that for lightly B-doped crystals heated under identical conditions over the temperature range studied. We briefly discuss the implication of these results upon oxygen precipitation mechanisms in Sb-doped silicon." @default.
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- W2045298710 date "1988-12-26" @default.
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- W2045298710 title "Temperature dependence of interstitial oxygen diffusion in antimony-doped Czochralski silicon" @default.
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- W2045298710 doi "https://doi.org/10.1063/1.100186" @default.
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