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- W2045301661 abstract "We demonstrate that the phosphorus diffusion doping of polysilicon films deposited on silicon dioxide results in the movement of underlying impurities of Na, Li, K, and B into the diffusion glass. The boron and alkali element transport is presumably due to the preferential segregation of impurities into the phosphorus glass via a grain boundary diffusion process. This was in contrast to silicon films doped in situ with phosphorus and subsequently recrystallized in an anneal. In the latter case, no diffusion glass was formed and little or no impurity removal was noted. The conclusion is that phosphorus‐diffused polysilicon is potentially better from a reliability standpoint as a gate electrode for metal oxide semiconductor devices." @default.
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- W2045301661 date "1993-05-01" @default.
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- W2045301661 title "Removal of Alkaline Impurities in a Polysilicon Gate Structure by Phosphorus Diffusion" @default.
- W2045301661 doi "https://doi.org/10.1149/1.2221570" @default.
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