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• W2045361263 abstract "Moire deflectometry is capable of accurately measuring various properties of reflective surfaces.The basic quantity derived from fringe shifts is a map of surface slopes in a given direction.When surface variations are small and rapid, such as on a rough surface, the Imperfections areevident as fringe contrast reduction rather than fringe distortions. The roughness parametersare obtained from the dependence of the contrast on deflectometer sensitivity. The fringevisibility vs. sensitivity curve is a scaled version of the surface autocovariance. Theautocovariance function allows quantitative evaluation of average surface heights, RMS, slopeRMS, periodicities, and other features which determine the surface quality. The method isdemonstrated on a diamond turned hard disk with concentric circular periodic grooves. Thesurface period and direction is derived from the autocovariance." @default.
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• W2045361263 date "1991-04-01" @default.
• W2045361263 modified "2023-09-23" @default.
• W2045361263 title "Determination of surface quality using moire methods" @default.
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• W2045361263 doi "https://doi.org/10.1117/12.49069" @default.
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