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- W2045397146 abstract "Abstract Annealing behavior of thin gate oxide after quasi-breakdown (QB) has been investigated. The result implies that the QB leakage current is consisted of two components: the enhanced tunneling due to locally thinned oxide at interface-damaged region and the conduction through a shortening path. The change of leakage current during annealing is a competitive process of changes of these two components - the recovery of interface damage and the expansion of the shortening path in bulk oxide. A unified model is proposed to explain the mechanism of conduction in QB." @default.
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- W2045397146 title "Annealing behavior of gate oxide leakage current after quasi-breakdown" @default.
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- W2045397146 doi "https://doi.org/10.1016/s0026-2714(00)00129-3" @default.
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