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- W2045414264 endingPage "075002" @default.
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- W2045414264 abstract "A repulsive-force out-of-plane large stroke translation micro electrostatic actuator is presented. A model of the actuator is presented and is used to relate the applied voltage to the out-of-plane displacement. Prototypes of the actuator are fabricated using the surface micromachining technology PolyMUMPs. The measured results show that the actuator can achieve a static out-of-plane translation of 86 µm for a driving voltage of 200 V. The measured static performance matches well with the results predicted by the model. The measured bandwidth (–3 dB) for the out-of-plane translation of the micro actuator is 80 and 200 Hz for input sinusoidal driving voltages varying in the ranges of 75–125 V and 125–175 V, respectively. The translation micro actuator can also achieve 2D rotation along any direction within a mechanical rotation range of ±1.5°. Vector display based on the actuator is also demonstrated." @default.
- W2045414264 created "2016-06-24" @default.
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- W2045414264 date "2011-06-01" @default.
- W2045414264 modified "2023-10-06" @default.
- W2045414264 title "Repulsive-force out-of-plane large stroke translation micro electrostatic actuator" @default.
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- W2045414264 doi "https://doi.org/10.1088/0960-1317/21/7/075002" @default.
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