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- W2045425478 abstract "Combined measurements of the transient electrical conductance, optical reflectance and absorbed energy have been used to determine the dynamics of the annealing process during laser irradiation of bulk silicon and silicon on sapphire. The combined transient conductance and optical reflectance yield the regrowth velocity and melt duration in bulk silicon; in silicon on sapphire the measurements also yield the melt velocity and maximum melt depth. Measurement of the absorbed energy provides energy coupling data used in numerical calculations of the melt dynamics for direct comparison with experiment in bulk silicon and the result indicates annealing proceeds by a purely thermal process." @default.
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- W2045425478 date "1983-02-01" @default.
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- W2045425478 title "Measurements of the melt dynamics in laser annealed semiconductors" @default.
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- W2045425478 doi "https://doi.org/10.1016/0378-4363(83)90307-8" @default.
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