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• W2045441431 endingPage "2689" @default.
• W2045441431 startingPage "2680" @default.
• W2045441431 abstract "The damage accumulation in ion-implanted semiconductors is analysed using Rutherford backscattering spectrometry (RBS). When energetic ions are implanted in a material, they transfer their energy mainly into atomic collision processes (nuclear energy loss) and in electronic excitations (electronic energy loss). For a given material this primary energy deposition is determined by the mass and energy of the implanted ions and the ion fluence (number of ions per unit area). However, the damage concentration which is measured after implantation does not only depend on the primary energy deposition, but is strongly influenced by secondary effects like defect annealing and defect transformation. For the latter processes the target temperature and the ion flux (number of ions per unit area and time) play an important role. In this presentation the influence of the various parameters mentioned above on the damage accumulation is demonstrated for various materials. Simple empirical models are applied to get information about the processes occurring and to systematize the results for the various semiconductors." @default.
• W2045441431 created "2016-06-24" @default.
• W2045441431 creator A5027474074 @default.
• W2045441431 date "2009-08-01" @default.
• W2045441431 modified "2023-09-30" @default.
• W2045441431 title "Mechanisms of damage formation in semiconductors" @default.
• W2045441431 cites W1964965188 @default.
• W2045441431 cites W1966957326 @default.
• W2045441431 cites W1967007054 @default.
• W2045441431 cites W1967274321 @default.
• W2045441431 cites W1969571686 @default.
• W2045441431 cites W1975967090 @default.
• W2045441431 cites W1978708711 @default.
• W2045441431 cites W1984315097 @default.
• W2045441431 cites W1996347391 @default.
• W2045441431 cites W1999173502 @default.
• W2045441431 cites W2005909504 @default.
• W2045441431 cites W2010477482 @default.
• W2045441431 cites W2011206528 @default.
• W2045441431 cites W2012100340 @default.
• W2045441431 cites W2012414669 @default.
• W2045441431 cites W2013291518 @default.
• W2045441431 cites W2015752762 @default.
• W2045441431 cites W2016400913 @default.
• W2045441431 cites W2018582444 @default.
• W2045441431 cites W2023886737 @default.
• W2045441431 cites W2026124762 @default.
• W2045441431 cites W2030124709 @default.
• W2045441431 cites W2030503501 @default.
• W2045441431 cites W2031247272 @default.
• W2045441431 cites W2031788804 @default.
• W2045441431 cites W2031826876 @default.
• W2045441431 cites W2039446868 @default.
• W2045441431 cites W2040490295 @default.
• W2045441431 cites W2042773614 @default.
• W2045441431 cites W2045345515 @default.
• W2045441431 cites W2045857998 @default.
• W2045441431 cites W2048560218 @default.
• W2045441431 cites W2056508175 @default.
• W2045441431 cites W2057476356 @default.
• W2045441431 cites W2059805736 @default.
• W2045441431 cites W2061456351 @default.
• W2045441431 cites W2068060619 @default.
• W2045441431 cites W2069465201 @default.
• W2045441431 cites W2069749157 @default.
• W2045441431 cites W2079571932 @default.
• W2045441431 cites W2081405082 @default.
• W2045441431 cites W2085873175 @default.
• W2045441431 cites W2087838495 @default.
• W2045441431 cites W2088186811 @default.
• W2045441431 cites W2089263315 @default.
• W2045441431 cites W2090502067 @default.
• W2045441431 cites W2090999746 @default.
• W2045441431 cites W2091031248 @default.
• W2045441431 cites W2094187575 @default.
• W2045441431 cites W2144759212 @default.
• W2045441431 cites W2152022850 @default.
• W2045441431 cites W2169602297 @default.
• W2045441431 doi "https://doi.org/10.1016/j.nimb.2009.05.059" @default.
• W2045441431 hasPublicationYear "2009" @default.
• W2045441431 type Work @default.
• W2045441431 sameAs 2045441431 @default.
• W2045441431 citedByCount "54" @default.
• W2045441431 countsByYear W20454414312012 @default.
• W2045441431 countsByYear W20454414312013 @default.
• W2045441431 countsByYear W20454414312014 @default.
• W2045441431 countsByYear W20454414312015 @default.
• W2045441431 countsByYear W20454414312016 @default.
• W2045441431 countsByYear W20454414312017 @default.
• W2045441431 countsByYear W20454414312018 @default.
• W2045441431 countsByYear W20454414312019 @default.
• W2045441431 countsByYear W20454414312020 @default.
• W2045441431 countsByYear W20454414312021 @default.
• W2045441431 countsByYear W20454414312022 @default.
• W2045441431 countsByYear W20454414312023 @default.
• W2045441431 crossrefType "journal-article" @default.
• W2045441431 hasAuthorship W2045441431A5027474074 @default.
• W2045441431 hasConcept C108225325 @default.
• W2045441431 hasConcept C111337013 @default.
• W2045441431 hasConcept C121332964 @default.
• W2045441431 hasConcept C145148216 @default.
• W2045441431 hasConcept C153428861 @default.
• W2045441431 hasConcept C159467904 @default.
• W2045441431 hasConcept C159985019 @default.
• W2045441431 hasConcept C171250308 @default.
• W2045441431 hasConcept C178790620 @default.
• W2045441431 hasConcept C184779094 @default.
• W2045441431 hasConcept C185544564 @default.
• W2045441431 hasConcept C185592680 @default.
• W2045441431 hasConcept C19067145 @default.
• W2045441431 hasConcept C192562407 @default.
• W2045441431 hasConcept C22078206 @default.
• W2045441431 hasConcept C22423302 @default.
• W2045441431 hasConcept C2777855556 @default.
• W2045441431 hasConcept C41823505 @default.
• W2045441431 hasConcept C49040817 @default.
• W2045441431 hasConcept C57160762 @default.
• W2045441431 hasConceptScore W2045441431C108225325 @default.

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