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• W2045455909 endingPage "764" @default.
• W2045455909 startingPage "759" @default.
• W2045455909 abstract "UV-absorbing silicon monoxide (SiO x , x≈1) thin films on fused silica substrates are irradiated by an ArF excimer laser (wavelength 193 nm) in the sub-ablation threshold regime. Multi-pulse irradiation of films with ∼200-nm thickness at a fluence of about 100 mJ/cm2 leads to a significant increase of the UV transmission, indicating the oxidation of SiO x to SiO2. The quality of the obtained films after this laser annealing process depends on the oxygen content of the environment. Irradiation in air at atmospheric pressure leads to the formation of sub-micron-sized oxide particles on top of the film. Structured illumination is applied either to form areas of the film with changed transmission and refractive index, or for the formation of regular particle patterns with sub-micron periods. These processes can be utilized for the fabrication of phase masks or for various types of surface functionalization." @default.
• W2045455909 created "2016-06-24" @default.
• W2045455909 creator A5021244349 @default.
• W2045455909 creator A5031875697 @default.
• W2045455909 creator A5057415790 @default.
• W2045455909 date "2011-05-19" @default.
• W2045455909 modified "2023-10-16" @default.
• W2045455909 title "Patterned laser annealing of silicon oxide films" @default.
• W2045455909 cites W1638568437 @default.
• W2045455909 cites W1991902012 @default.
• W2045455909 cites W2034163069 @default.
• W2045455909 cites W2036701661 @default.
• W2045455909 cites W2041536577 @default.
• W2045455909 cites W2043718768 @default.
• W2045455909 cites W2046366312 @default.
• W2045455909 cites W2057824029 @default.
• W2045455909 cites W2059736355 @default.
• W2045455909 cites W2069785286 @default.
• W2045455909 cites W2084403749 @default.
• W2045455909 cites W2085537466 @default.
• W2045455909 cites W2139474823 @default.
• W2045455909 doi "https://doi.org/10.1007/s00339-011-6451-8" @default.
• W2045455909 hasPublicationYear "2011" @default.
• W2045455909 type Work @default.
• W2045455909 sameAs 2045455909 @default.
• W2045455909 citedByCount "8" @default.
• W2045455909 countsByYear W20454559092012 @default.
• W2045455909 countsByYear W20454559092014 @default.
• W2045455909 countsByYear W20454559092015 @default.
• W2045455909 countsByYear W20454559092017 @default.
• W2045455909 countsByYear W20454559092022 @default.
• W2045455909 crossrefType "journal-article" @default.
• W2045455909 hasAuthorship W2045455909A5021244349 @default.
• W2045455909 hasAuthorship W2045455909A5031875697 @default.
• W2045455909 hasAuthorship W2045455909A5057415790 @default.
• W2045455909 hasBestOaLocation W20454559092 @default.
• W2045455909 hasConcept C111337013 @default.
• W2045455909 hasConcept C113196181 @default.
• W2045455909 hasConcept C115537861 @default.
• W2045455909 hasConcept C120665830 @default.
• W2045455909 hasConcept C121332964 @default.
• W2045455909 hasConcept C127413603 @default.
• W2045455909 hasConcept C136525101 @default.
• W2045455909 hasConcept C142724271 @default.
• W2045455909 hasConcept C159985019 @default.
• W2045455909 hasConcept C171250308 @default.
• W2045455909 hasConcept C185544564 @default.
• W2045455909 hasConcept C185592680 @default.
• W2045455909 hasConcept C19067145 @default.
• W2045455909 hasConcept C191897082 @default.
• W2045455909 hasConcept C192562407 @default.
• W2045455909 hasConcept C204787440 @default.
• W2045455909 hasConcept C22078206 @default.
• W2045455909 hasConcept C2777431650 @default.
• W2045455909 hasConcept C2777855556 @default.
• W2045455909 hasConcept C2778133012 @default.
• W2045455909 hasConcept C2779089622 @default.
• W2045455909 hasConcept C2779105228 @default.
• W2045455909 hasConcept C2779188808 @default.
• W2045455909 hasConcept C2779851234 @default.
• W2045455909 hasConcept C2780477314 @default.
• W2045455909 hasConcept C42067758 @default.
• W2045455909 hasConcept C42360764 @default.
• W2045455909 hasConcept C43617362 @default.
• W2045455909 hasConcept C49040817 @default.
• W2045455909 hasConcept C520434653 @default.
• W2045455909 hasConcept C544956773 @default.
• W2045455909 hasConcept C71924100 @default.
• W2045455909 hasConceptScore W2045455909C111337013 @default.
• W2045455909 hasConceptScore W2045455909C113196181 @default.
• W2045455909 hasConceptScore W2045455909C115537861 @default.
• W2045455909 hasConceptScore W2045455909C120665830 @default.
• W2045455909 hasConceptScore W2045455909C121332964 @default.
• W2045455909 hasConceptScore W2045455909C127413603 @default.
• W2045455909 hasConceptScore W2045455909C136525101 @default.
• W2045455909 hasConceptScore W2045455909C142724271 @default.
• W2045455909 hasConceptScore W2045455909C159985019 @default.
• W2045455909 hasConceptScore W2045455909C171250308 @default.
• W2045455909 hasConceptScore W2045455909C185544564 @default.
• W2045455909 hasConceptScore W2045455909C185592680 @default.
• W2045455909 hasConceptScore W2045455909C19067145 @default.
• W2045455909 hasConceptScore W2045455909C191897082 @default.
• W2045455909 hasConceptScore W2045455909C192562407 @default.
• W2045455909 hasConceptScore W2045455909C204787440 @default.
• W2045455909 hasConceptScore W2045455909C22078206 @default.
• W2045455909 hasConceptScore W2045455909C2777431650 @default.
• W2045455909 hasConceptScore W2045455909C2777855556 @default.
• W2045455909 hasConceptScore W2045455909C2778133012 @default.
• W2045455909 hasConceptScore W2045455909C2779089622 @default.
• W2045455909 hasConceptScore W2045455909C2779105228 @default.
• W2045455909 hasConceptScore W2045455909C2779188808 @default.
• W2045455909 hasConceptScore W2045455909C2779851234 @default.
• W2045455909 hasConceptScore W2045455909C2780477314 @default.
• W2045455909 hasConceptScore W2045455909C42067758 @default.
• W2045455909 hasConceptScore W2045455909C42360764 @default.
• W2045455909 hasConceptScore W2045455909C43617362 @default.
• W2045455909 hasConceptScore W2045455909C49040817 @default.
• W2045455909 hasConceptScore W2045455909C520434653 @default.

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