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• W2045548571 endingPage "035031" @default.
• W2045548571 startingPage "035031" @default.
• W2045548571 abstract "A new approach is developed for evaluating the adhesion of SU-8 thin films using a surface acoustic wave (SAW) sensor. The SAW sensor consists of a silicon (Si) substrate coated with a thin aluminum nitride (AlN) film and two sets of inter-digital electrodes (IDT) patterned on the AlN surface. Two sensor configurations are developed in order to evaluate the adhesion of SU-8. In the first configuration the SU-8 layer is patterned on top of a gold film that is deposited on the AlN surface. In the second configuration the gold film is coated with an omnicoat layer prior to patterning the SU-8 film. Omnicoat is an adhesion promoter for SU-8, which is used to increase its adhesion to gold. The frequency responses from both configurations are measured and the shift in the center frequency value is evaluated. The results illustrate that without omnicoat the center frequency shifts to a higher value indicating an increase in the wave velocity. This is because the poor adhesion of the SU-8 layer without omnicoat causes the wave to be more concentrated in the AlN/Si structure and AlN has a higher acoustic wave velocity in comparison to the SU-8 layer. In addition, four SAW sensors operating at four different center frequencies are developed to investigate the change in sensor sensitivity with the increase in center frequency. The results indicate that the sensor sensitivity increases proportionally to the increase in operating frequency. Finally, a theoretical model is developed to calculate the wave dispersion profile for the SU-8/AlN/Si configuration. The interface of the SU-8/AlN layers is modeled as a layer of mass-less springs with stiffness K(N m−3). The shifts in the wave dispersion profile at different levels of interface spring stiffness are compared to the experimental values to evaluate the adhesion of the SU-8 layer." @default.
• W2045548571 created "2016-06-24" @default.
• W2045548571 creator A5016338220 @default.
• W2045548571 creator A5049879303 @default.
• W2045548571 date "2015-02-18" @default.
• W2045548571 modified "2023-09-24" @default.
• W2045548571 title "Evaluating the adhesion of SU-8 thin films using an AlN/Si surface acoustic wave sensor" @default.
• W2045548571 cites W1964028703 @default.
• W2045548571 cites W1965438452 @default.
• W2045548571 cites W1966417765 @default.
• W2045548571 cites W1968848848 @default.
• W2045548571 cites W1970855656 @default.
• W2045548571 cites W1977348941 @default.
• W2045548571 cites W1981542565 @default.
• W2045548571 cites W1981940392 @default.
• W2045548571 cites W1989748486 @default.
• W2045548571 cites W1993717184 @default.
• W2045548571 cites W2011692421 @default.
• W2045548571 cites W2015445221 @default.
• W2045548571 cites W2025563675 @default.
• W2045548571 cites W2027269482 @default.
• W2045548571 cites W2030970608 @default.
• W2045548571 cites W2032681615 @default.
• W2045548571 cites W2034236995 @default.
• W2045548571 cites W2034296323 @default.
• W2045548571 cites W2035437421 @default.
• W2045548571 cites W2037863142 @default.
• W2045548571 cites W2038166820 @default.
• W2045548571 cites W2038232799 @default.
• W2045548571 cites W2038825251 @default.
• W2045548571 cites W2039745279 @default.
• W2045548571 cites W2045429115 @default.
• W2045548571 cites W2047509535 @default.
• W2045548571 cites W2051999024 @default.
• W2045548571 cites W2055292572 @default.
• W2045548571 cites W2058259185 @default.
• W2045548571 cites W2060804804 @default.
• W2045548571 cites W2063476036 @default.
• W2045548571 cites W2068616663 @default.
• W2045548571 cites W2071172450 @default.
• W2045548571 cites W2079330553 @default.
• W2045548571 cites W2094109235 @default.
• W2045548571 cites W2098912643 @default.
• W2045548571 cites W2102494900 @default.
• W2045548571 cites W2122972027 @default.
• W2045548571 cites W2130020222 @default.
• W2045548571 cites W2135147665 @default.
• W2045548571 cites W2142023360 @default.
• W2045548571 cites W2144089685 @default.
• W2045548571 cites W2158151297 @default.
• W2045548571 cites W2171789101 @default.
• W2045548571 doi "https://doi.org/10.1088/0960-1317/25/3/035031" @default.
• W2045548571 hasPublicationYear "2015" @default.
• W2045548571 type Work @default.
• W2045548571 sameAs 2045548571 @default.
• W2045548571 citedByCount "2" @default.
• W2045548571 countsByYear W20455485712016 @default.
• W2045548571 countsByYear W20455485712022 @default.
• W2045548571 crossrefType "journal-article" @default.
• W2045548571 hasAuthorship W2045548571A5016338220 @default.
• W2045548571 hasAuthorship W2045548571A5049879303 @default.
• W2045548571 hasConcept C121332964 @default.
• W2045548571 hasConcept C159985019 @default.
• W2045548571 hasConcept C162954803 @default.
• W2045548571 hasConcept C171250308 @default.
• W2045548571 hasConcept C19067145 @default.
• W2045548571 hasConcept C192562407 @default.
• W2045548571 hasConcept C24890656 @default.
• W2045548571 hasConcept C2524010 @default.
• W2045548571 hasConcept C2776799497 @default.
• W2045548571 hasConcept C33923547 @default.
• W2045548571 hasConcept C49040817 @default.
• W2045548571 hasConcept C84416704 @default.
• W2045548571 hasConceptScore W2045548571C121332964 @default.
• W2045548571 hasConceptScore W2045548571C159985019 @default.
• W2045548571 hasConceptScore W2045548571C162954803 @default.
• W2045548571 hasConceptScore W2045548571C171250308 @default.
• W2045548571 hasConceptScore W2045548571C19067145 @default.
• W2045548571 hasConceptScore W2045548571C192562407 @default.
• W2045548571 hasConceptScore W2045548571C24890656 @default.
• W2045548571 hasConceptScore W2045548571C2524010 @default.
• W2045548571 hasConceptScore W2045548571C2776799497 @default.
• W2045548571 hasConceptScore W2045548571C33923547 @default.
• W2045548571 hasConceptScore W2045548571C49040817 @default.
• W2045548571 hasConceptScore W2045548571C84416704 @default.
• W2045548571 hasIssue "3" @default.
• W2045548571 hasLocation W20455485711 @default.
• W2045548571 hasOpenAccess W2045548571 @default.
• W2045548571 hasPrimaryLocation W20455485711 @default.
• W2045548571 hasRelatedWork W2051270029 @default.
• W2045548571 hasRelatedWork W2082293200 @default.
• W2045548571 hasRelatedWork W2137307547 @default.
• W2045548571 hasRelatedWork W2380293314 @default.
• W2045548571 hasRelatedWork W2943188944 @default.
• W2045548571 hasRelatedWork W4230420381 @default.
• W2045548571 hasRelatedWork W4233720049 @default.
• W2045548571 hasRelatedWork W4249574497 @default.
• W2045548571 hasRelatedWork W4250389283 @default.

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