Matches in SemOpenAlex for { <https://semopenalex.org/work/W2045579982> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2045579982 endingPage "1085" @default.
- W2045579982 startingPage "1085" @default.
- W2045579982 abstract "The purpose of this study was to investigate the effect of chemicals and particles on chemical mechanical polishing (CMP) of polyimide (PI). The effect of particle size and its surface area on both the removal rates and the surface roughness was investigated as a function of the slurry content upon the addition of various chemicals. The optimal particle content was measured for silica, ceria and alumina slurries in terms of the removal rate and surface roughness. The removal rate was highest when deionized (DI)-water-based alumina slurry was used. However, the greatest surface roughness was measured when ceria slurry was used rather than alumina. Alkaline chemicals were added to the slurry to enhance the removal rates of PI during CMP. The addition of Tetramethyl Ammonium Hydroxide (TMAH) and Potassium Hydroxide (KOH) to ceria slurry but not to alumina and silica slurries increased the removal rate significantly at higher pH values. The addition of ethylenediamine and the presoaking of PI in hot DI water did not increase the removal rate in alkaline-chemical-based slurries. The addition of surfactant resulted in a decrease of the removal rate to half of that determined without the addition of surfactant." @default.
- W2045579982 created "2016-06-24" @default.
- W2045579982 creator A5008135517 @default.
- W2045579982 creator A5011297808 @default.
- W2045579982 creator A5043566534 @default.
- W2045579982 creator A5084302829 @default.
- W2045579982 date "2000-03-01" @default.
- W2045579982 modified "2023-09-23" @default.
- W2045579982 title "Effect of Chemicals and Slurry Particles on Chemical Mechamical Polishing of Polyimide" @default.
- W2045579982 cites W1975039686 @default.
- W2045579982 cites W1979525535 @default.
- W2045579982 cites W2013422119 @default.
- W2045579982 cites W2044861675 @default.
- W2045579982 cites W2091989934 @default.
- W2045579982 cites W2098226079 @default.
- W2045579982 cites W2099804149 @default.
- W2045579982 cites W2314749151 @default.
- W2045579982 cites W2328059368 @default.
- W2045579982 cites W2944262003 @default.
- W2045579982 cites W2944728552 @default.
- W2045579982 cites W4236939440 @default.
- W2045579982 doi "https://doi.org/10.1143/jjap.39.1085" @default.
- W2045579982 hasPublicationYear "2000" @default.
- W2045579982 type Work @default.
- W2045579982 sameAs 2045579982 @default.
- W2045579982 citedByCount "12" @default.
- W2045579982 countsByYear W20455799822015 @default.
- W2045579982 countsByYear W20455799822022 @default.
- W2045579982 crossrefType "journal-article" @default.
- W2045579982 hasAuthorship W2045579982A5008135517 @default.
- W2045579982 hasAuthorship W2045579982A5011297808 @default.
- W2045579982 hasAuthorship W2045579982A5043566534 @default.
- W2045579982 hasAuthorship W2045579982A5084302829 @default.
- W2045579982 hasConcept C107365816 @default.
- W2045579982 hasConcept C111368507 @default.
- W2045579982 hasConcept C127313418 @default.
- W2045579982 hasConcept C127413603 @default.
- W2045579982 hasConcept C138113353 @default.
- W2045579982 hasConcept C159985019 @default.
- W2045579982 hasConcept C171250308 @default.
- W2045579982 hasConcept C178790620 @default.
- W2045579982 hasConcept C179104552 @default.
- W2045579982 hasConcept C180088628 @default.
- W2045579982 hasConcept C185592680 @default.
- W2045579982 hasConcept C187530423 @default.
- W2045579982 hasConcept C191897082 @default.
- W2045579982 hasConcept C192562407 @default.
- W2045579982 hasConcept C2775896084 @default.
- W2045579982 hasConcept C2777879272 @default.
- W2045579982 hasConcept C2778517922 @default.
- W2045579982 hasConcept C2779439175 @default.
- W2045579982 hasConcept C2780127704 @default.
- W2045579982 hasConcept C42360764 @default.
- W2045579982 hasConcept C58226133 @default.
- W2045579982 hasConcept C94293008 @default.
- W2045579982 hasConceptScore W2045579982C107365816 @default.
- W2045579982 hasConceptScore W2045579982C111368507 @default.
- W2045579982 hasConceptScore W2045579982C127313418 @default.
- W2045579982 hasConceptScore W2045579982C127413603 @default.
- W2045579982 hasConceptScore W2045579982C138113353 @default.
- W2045579982 hasConceptScore W2045579982C159985019 @default.
- W2045579982 hasConceptScore W2045579982C171250308 @default.
- W2045579982 hasConceptScore W2045579982C178790620 @default.
- W2045579982 hasConceptScore W2045579982C179104552 @default.
- W2045579982 hasConceptScore W2045579982C180088628 @default.
- W2045579982 hasConceptScore W2045579982C185592680 @default.
- W2045579982 hasConceptScore W2045579982C187530423 @default.
- W2045579982 hasConceptScore W2045579982C191897082 @default.
- W2045579982 hasConceptScore W2045579982C192562407 @default.
- W2045579982 hasConceptScore W2045579982C2775896084 @default.
- W2045579982 hasConceptScore W2045579982C2777879272 @default.
- W2045579982 hasConceptScore W2045579982C2778517922 @default.
- W2045579982 hasConceptScore W2045579982C2779439175 @default.
- W2045579982 hasConceptScore W2045579982C2780127704 @default.
- W2045579982 hasConceptScore W2045579982C42360764 @default.
- W2045579982 hasConceptScore W2045579982C58226133 @default.
- W2045579982 hasConceptScore W2045579982C94293008 @default.
- W2045579982 hasIssue "3R" @default.
- W2045579982 hasLocation W20455799821 @default.
- W2045579982 hasOpenAccess W2045579982 @default.
- W2045579982 hasPrimaryLocation W20455799821 @default.
- W2045579982 hasRelatedWork W1965086763 @default.
- W2045579982 hasRelatedWork W1989850475 @default.
- W2045579982 hasRelatedWork W1995628238 @default.
- W2045579982 hasRelatedWork W1998935934 @default.
- W2045579982 hasRelatedWork W2045579982 @default.
- W2045579982 hasRelatedWork W2076501399 @default.
- W2045579982 hasRelatedWork W2323082812 @default.
- W2045579982 hasRelatedWork W2326774207 @default.
- W2045579982 hasRelatedWork W2333979735 @default.
- W2045579982 hasRelatedWork W2356978086 @default.
- W2045579982 hasVolume "39" @default.
- W2045579982 isParatext "false" @default.
- W2045579982 isRetracted "false" @default.
- W2045579982 magId "2045579982" @default.
- W2045579982 workType "article" @default.