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- W2045617962 abstract "We present two techniques to use hybrid sol-gel materials for electron-beam lithography and direct writing of surface relief diffractive elements. We are able to obtain direct physical electron beam etching of hybrid sol-gel glass and variable- doses can induce complex multi-phase-level diffractive elements and apodized sol-gel waveguide gratings. We are also able to obtain hybrid so-gel glass formation under the electron radiation, so that material can be used as a negative resist in electron-beam lithography. Both of these techniques are promising for the fabrication of submicron optical components and micromachining tools such as embossing masters for the replication." @default.
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- W2045617962 date "1998-07-06" @default.
- W2045617962 modified "2023-09-23" @default.
- W2045617962 title "<title>Electron-radiation-sensitive hybrid sol-gel materials for electron-beam lithography and diffractive optics</title>" @default.
- W2045617962 doi "https://doi.org/10.1117/12.312923" @default.
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