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- W2045624891 abstract "As low cost and low volume gain increasing importance in today's technology market, the development of a silicon micro-machined multi-layer transmit module has become a worthwhile endeavor. In this architecture, the MMICs are flip-chip bonded and the 94 GHz signal is distributed both laterally and vertically through three silicon layers resulting in excitation of a four by four array of patch antennas. This module is 6 mm in length, 6 mm in width, 1 mm in height, and represents the first W-band transmit module to date. The details of the passive components and interconnects will be presented in this paper." @default.
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- W2045624891 date "2000-10-01" @default.
- W2045624891 modified "2023-09-26" @default.
- W2045624891 title "Interconnects for a Multi-Layer Three-Dimensional Silicon Architecture" @default.
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- W2045624891 doi "https://doi.org/10.1109/euma.2000.338761" @default.
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