Matches in SemOpenAlex for { <https://semopenalex.org/work/W2045625496> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2045625496 endingPage "F55" @default.
- W2045625496 startingPage "F55" @default.
- W2045625496 abstract "A fabrication method is described to form high aspect ratio, complex structures. This fabrication method combines nanoimprint lithography and photolithography together, to produce macroscale features with microscale structures on them in a sequential process, with one ultraviolet exposure step and no transfer layers. The imprint step used a prefabricated stamp to directly emboss the photosensitive polymer prior to ultraviolet exposure without affecting the photosensitivity of the polymer. A temporary glass layer was deposited over the imprinted structure to preserve the fine features so that the large-scale photodefinition process could be completed. Avatrel 2090P was photodefined with diffractive grating features on top of polymer pillars. © 2004 The Electrochemical Society. All rights reserved." @default.
- W2045625496 created "2016-06-24" @default.
- W2045625496 creator A5020547921 @default.
- W2045625496 creator A5051789763 @default.
- W2045625496 creator A5073589308 @default.
- W2045625496 date "2004-01-01" @default.
- W2045625496 modified "2023-10-18" @default.
- W2045625496 title "Fabrication of Multifunctional Optical I/O via Imprint Lithography" @default.
- W2045625496 cites W2005485153 @default.
- W2045625496 cites W2086933933 @default.
- W2045625496 cites W2115669216 @default.
- W2045625496 cites W2138368127 @default.
- W2045625496 cites W2160800922 @default.
- W2045625496 cites W2536216509 @default.
- W2045625496 cites W4234109392 @default.
- W2045625496 doi "https://doi.org/10.1149/1.1792238" @default.
- W2045625496 hasPublicationYear "2004" @default.
- W2045625496 type Work @default.
- W2045625496 sameAs 2045625496 @default.
- W2045625496 citedByCount "0" @default.
- W2045625496 crossrefType "journal-article" @default.
- W2045625496 hasAuthorship W2045625496A5020547921 @default.
- W2045625496 hasAuthorship W2045625496A5051789763 @default.
- W2045625496 hasAuthorship W2045625496A5073589308 @default.
- W2045625496 hasConcept C105487726 @default.
- W2045625496 hasConcept C136525101 @default.
- W2045625496 hasConcept C142724271 @default.
- W2045625496 hasConcept C145420912 @default.
- W2045625496 hasConcept C159985019 @default.
- W2045625496 hasConcept C171250308 @default.
- W2045625496 hasConcept C179428855 @default.
- W2045625496 hasConcept C186807665 @default.
- W2045625496 hasConcept C192562407 @default.
- W2045625496 hasConcept C204223013 @default.
- W2045625496 hasConcept C204787440 @default.
- W2045625496 hasConcept C2776798109 @default.
- W2045625496 hasConcept C2777046567 @default.
- W2045625496 hasConcept C2777682490 @default.
- W2045625496 hasConcept C2777813233 @default.
- W2045625496 hasConcept C2779227376 @default.
- W2045625496 hasConcept C2781448156 @default.
- W2045625496 hasConcept C2987116853 @default.
- W2045625496 hasConcept C33923547 @default.
- W2045625496 hasConcept C49040817 @default.
- W2045625496 hasConcept C521977710 @default.
- W2045625496 hasConcept C53524968 @default.
- W2045625496 hasConcept C71924100 @default.
- W2045625496 hasConceptScore W2045625496C105487726 @default.
- W2045625496 hasConceptScore W2045625496C136525101 @default.
- W2045625496 hasConceptScore W2045625496C142724271 @default.
- W2045625496 hasConceptScore W2045625496C145420912 @default.
- W2045625496 hasConceptScore W2045625496C159985019 @default.
- W2045625496 hasConceptScore W2045625496C171250308 @default.
- W2045625496 hasConceptScore W2045625496C179428855 @default.
- W2045625496 hasConceptScore W2045625496C186807665 @default.
- W2045625496 hasConceptScore W2045625496C192562407 @default.
- W2045625496 hasConceptScore W2045625496C204223013 @default.
- W2045625496 hasConceptScore W2045625496C204787440 @default.
- W2045625496 hasConceptScore W2045625496C2776798109 @default.
- W2045625496 hasConceptScore W2045625496C2777046567 @default.
- W2045625496 hasConceptScore W2045625496C2777682490 @default.
- W2045625496 hasConceptScore W2045625496C2777813233 @default.
- W2045625496 hasConceptScore W2045625496C2779227376 @default.
- W2045625496 hasConceptScore W2045625496C2781448156 @default.
- W2045625496 hasConceptScore W2045625496C2987116853 @default.
- W2045625496 hasConceptScore W2045625496C33923547 @default.
- W2045625496 hasConceptScore W2045625496C49040817 @default.
- W2045625496 hasConceptScore W2045625496C521977710 @default.
- W2045625496 hasConceptScore W2045625496C53524968 @default.
- W2045625496 hasConceptScore W2045625496C71924100 @default.
- W2045625496 hasIssue "10" @default.
- W2045625496 hasLocation W20456254961 @default.
- W2045625496 hasOpenAccess W2045625496 @default.
- W2045625496 hasPrimaryLocation W20456254961 @default.
- W2045625496 hasRelatedWork W1830089573 @default.
- W2045625496 hasRelatedWork W1976324500 @default.
- W2045625496 hasRelatedWork W1982352726 @default.
- W2045625496 hasRelatedWork W1983078047 @default.
- W2045625496 hasRelatedWork W1983324775 @default.
- W2045625496 hasRelatedWork W1989267639 @default.
- W2045625496 hasRelatedWork W2021824388 @default.
- W2045625496 hasRelatedWork W2041535186 @default.
- W2045625496 hasRelatedWork W2055001723 @default.
- W2045625496 hasRelatedWork W2055608478 @default.
- W2045625496 hasVolume "7" @default.
- W2045625496 isParatext "false" @default.
- W2045625496 isRetracted "false" @default.
- W2045625496 magId "2045625496" @default.
- W2045625496 workType "article" @default.