FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2045669053> ?p ?o ?g. }

• W2045669053 endingPage "2569" @default.
• W2045669053 startingPage "2552" @default.
• W2045669053 abstract "Electron cyclotron resonance (ECR) plasma reactors are being developed for etching and deposition of thin films during integrated circuit fabrication. To control critical parameters such as the flux and energy distribution of ions impacting surfaces, it is necessary to understand how these parameters are influenced by physical construction, electromagnetic design, and chemical kinetics. In this work, we report detailed measurements of ion velocity distributions in both the source and reactor regions of an ECR system using mixtures of Ar and He. Using Doppler-shifted laser-induced fluorescence spectroscopy, we measure metastable Ar-ion velocity distributions parallel and perpendicular to the magnetic field direction as a function of magnetic field amplitude, pressure, rf bias voltage, and microwave power. The measurements, in turn, are used to estimate the magnitude of electrostatic potentials and fields parallel and perpendicular to the magnetic field. Indicative of ion trapping, we find nearly isotropic ion velocity distributions when the source is operated as a magnetic mirror and the He partial pressure is low; higher He pressures tend to cool the parallel velocity distribution. Downstream, we consistently observe bimodal ion velocity distributions: the fast component, created in the source, follows magnetic flux lines into the reactor; the slow component, created mostly where the plasma expands from the source into the reaction chamber, is more isotropic. The relative amplitudes of these two components, the average ion energy, and the ion energy distribution are easily controlled by changing pressure and magnetic field." @default.
• W2045669053 created "2016-06-24" @default.
• W2045669053 creator A5019329564 @default.
• W2045669053 creator A5046895944 @default.
• W2045669053 creator A5048175278 @default.
• W2045669053 creator A5084262464 @default.
• W2045669053 date "1991-09-01" @default.
• W2045669053 modified "2023-10-17" @default.
• W2045669053 title "Ion transport in an electron cyclotron resonance plasma" @default.
• W2045669053 cites W1966926222 @default.
• W2045669053 cites W1967942851 @default.
• W2045669053 cites W1971285298 @default.
• W2045669053 cites W1976121193 @default.
• W2045669053 cites W1980038009 @default.
• W2045669053 cites W1986439322 @default.
• W2045669053 cites W1988324392 @default.
• W2045669053 cites W1988598879 @default.
• W2045669053 cites W2000821996 @default.
• W2045669053 cites W2001653578 @default.
• W2045669053 cites W2002273145 @default.
• W2045669053 cites W2003599075 @default.
• W2045669053 cites W2004393204 @default.
• W2045669053 cites W2009706894 @default.
• W2045669053 cites W2017508713 @default.
• W2045669053 cites W2018528136 @default.
• W2045669053 cites W2026792378 @default.
• W2045669053 cites W2033046907 @default.
• W2045669053 cites W2033732134 @default.
• W2045669053 cites W2034908220 @default.
• W2045669053 cites W2043027397 @default.
• W2045669053 cites W2045027252 @default.
• W2045669053 cites W2050484241 @default.
• W2045669053 cites W2052152997 @default.
• W2045669053 cites W2055872076 @default.
• W2045669053 cites W2061188684 @default.
• W2045669053 cites W2068437295 @default.
• W2045669053 cites W2069692648 @default.
• W2045669053 cites W2071516933 @default.
• W2045669053 cites W2082963826 @default.
• W2045669053 cites W2086307308 @default.
• W2045669053 cites W2090065290 @default.
• W2045669053 cites W2093283565 @default.
• W2045669053 cites W2093710318 @default.
• W2045669053 cites W2116194965 @default.
• W2045669053 cites W3146732660 @default.
• W2045669053 cites W434324634 @default.
• W2045669053 cites W4365787421 @default.
• W2045669053 doi "https://doi.org/10.1063/1.350332" @default.
• W2045669053 hasPublicationYear "1991" @default.
• W2045669053 type Work @default.
• W2045669053 sameAs 2045669053 @default.
• W2045669053 citedByCount "111" @default.
• W2045669053 countsByYear W20456690532013 @default.
• W2045669053 countsByYear W20456690532015 @default.
• W2045669053 countsByYear W20456690532016 @default.
• W2045669053 countsByYear W20456690532017 @default.
• W2045669053 countsByYear W20456690532018 @default.
• W2045669053 countsByYear W20456690532019 @default.
• W2045669053 countsByYear W20456690532020 @default.
• W2045669053 countsByYear W20456690532021 @default.
• W2045669053 crossrefType "journal-article" @default.
• W2045669053 hasAuthorship W2045669053A5019329564 @default.
• W2045669053 hasAuthorship W2045669053A5046895944 @default.
• W2045669053 hasAuthorship W2045669053A5048175278 @default.
• W2045669053 hasAuthorship W2045669053A5084262464 @default.
• W2045669053 hasConcept C121332964 @default.
• W2045669053 hasConcept C145148216 @default.
• W2045669053 hasConcept C175361016 @default.
• W2045669053 hasConcept C178790620 @default.
• W2045669053 hasConcept C184779094 @default.
• W2045669053 hasConcept C185592680 @default.
• W2045669053 hasConcept C188224857 @default.
• W2045669053 hasConcept C192562407 @default.
• W2045669053 hasConcept C193055867 @default.
• W2045669053 hasConcept C39527238 @default.
• W2045669053 hasConcept C62520636 @default.
• W2045669053 hasConcept C82706917 @default.
• W2045669053 hasConceptScore W2045669053C121332964 @default.
• W2045669053 hasConceptScore W2045669053C145148216 @default.
• W2045669053 hasConceptScore W2045669053C175361016 @default.
• W2045669053 hasConceptScore W2045669053C178790620 @default.
• W2045669053 hasConceptScore W2045669053C184779094 @default.
• W2045669053 hasConceptScore W2045669053C185592680 @default.
• W2045669053 hasConceptScore W2045669053C188224857 @default.
• W2045669053 hasConceptScore W2045669053C192562407 @default.
• W2045669053 hasConceptScore W2045669053C193055867 @default.
• W2045669053 hasConceptScore W2045669053C39527238 @default.
• W2045669053 hasConceptScore W2045669053C62520636 @default.
• W2045669053 hasConceptScore W2045669053C82706917 @default.
• W2045669053 hasIssue "5" @default.
• W2045669053 hasLocation W20456690531 @default.
• W2045669053 hasOpenAccess W2045669053 @default.
• W2045669053 hasPrimaryLocation W20456690531 @default.
• W2045669053 hasRelatedWork W1989388206 @default.
• W2045669053 hasRelatedWork W1997129508 @default.
• W2045669053 hasRelatedWork W2024675397 @default.
• W2045669053 hasRelatedWork W2076073891 @default.
• W2045669053 hasRelatedWork W2092020301 @default.

• next