Matches in SemOpenAlex for { <https://semopenalex.org/work/W2045687023> ?p ?o ?g. }
- W2045687023 endingPage "1660" @default.
- W2045687023 startingPage "1658" @default.
- W2045687023 abstract "Diffusion of boron from ion implanted polycrystalline silicon source through 12.5 nm oxides was measured as a function of annealing ambience and doping concentrations of phosphorus or arsenic in the polycrystalline silicon. For comparison, boron ion implanted into 500 nm oxides was also investigated. In both cases, annealing in forming gas (90% N2, 10% H2) increases the diffusion rate of boron over that in nitrogen and the rate increase is the result of a large increase in the pre-exponential term. Diffusion of ion implanted boron in oxides is much slower than that from an ion implanted polycrystalline silicon source. The lowering of the rate is the result of the five orders of magnitude decrease in the pre-exponential term, even though concurrently there is also a decrease in the activation energy. Co-doping of polycrystalline silicon with either phosphorus or arsenic lowers the pre-exponential term by approximately 10%. Therefore, we conclude that boron diffusion through oxides is entropy dominated." @default.
- W2045687023 created "2016-06-24" @default.
- W2045687023 creator A5031460799 @default.
- W2045687023 creator A5080547016 @default.
- W2045687023 date "1986-06-16" @default.
- W2045687023 modified "2023-10-09" @default.
- W2045687023 title "Ambient and dopant effects on boron diffusion in oxides" @default.
- W2045687023 cites W1807292705 @default.
- W2045687023 cites W1979884833 @default.
- W2045687023 cites W1982584359 @default.
- W2045687023 cites W2015238108 @default.
- W2045687023 cites W2021793497 @default.
- W2045687023 cites W2023387423 @default.
- W2045687023 cites W2038838017 @default.
- W2045687023 cites W2072591006 @default.
- W2045687023 cites W2076641673 @default.
- W2045687023 cites W2081643442 @default.
- W2045687023 cites W2156661252 @default.
- W2045687023 cites W2211164273 @default.
- W2045687023 doi "https://doi.org/10.1063/1.96846" @default.
- W2045687023 hasPublicationYear "1986" @default.
- W2045687023 type Work @default.
- W2045687023 sameAs 2045687023 @default.
- W2045687023 citedByCount "49" @default.
- W2045687023 countsByYear W20456870232012 @default.
- W2045687023 countsByYear W20456870232013 @default.
- W2045687023 countsByYear W20456870232016 @default.
- W2045687023 crossrefType "journal-article" @default.
- W2045687023 hasAuthorship W2045687023A5031460799 @default.
- W2045687023 hasAuthorship W2045687023A5080547016 @default.
- W2045687023 hasConcept C113196181 @default.
- W2045687023 hasConcept C121332964 @default.
- W2045687023 hasConcept C137637335 @default.
- W2045687023 hasConcept C145148216 @default.
- W2045687023 hasConcept C147789679 @default.
- W2045687023 hasConcept C171250308 @default.
- W2045687023 hasConcept C178790620 @default.
- W2045687023 hasConcept C179104552 @default.
- W2045687023 hasConcept C185592680 @default.
- W2045687023 hasConcept C191897082 @default.
- W2045687023 hasConcept C191952053 @default.
- W2045687023 hasConcept C192562407 @default.
- W2045687023 hasConcept C2777855556 @default.
- W2045687023 hasConcept C2779227376 @default.
- W2045687023 hasConcept C2779889077 @default.
- W2045687023 hasConcept C2780565262 @default.
- W2045687023 hasConcept C41823505 @default.
- W2045687023 hasConcept C43617362 @default.
- W2045687023 hasConcept C49040817 @default.
- W2045687023 hasConcept C501308230 @default.
- W2045687023 hasConcept C502230775 @default.
- W2045687023 hasConcept C544956773 @default.
- W2045687023 hasConcept C57863236 @default.
- W2045687023 hasConcept C69357855 @default.
- W2045687023 hasConcept C87359718 @default.
- W2045687023 hasConcept C95121573 @default.
- W2045687023 hasConcept C97355855 @default.
- W2045687023 hasConceptScore W2045687023C113196181 @default.
- W2045687023 hasConceptScore W2045687023C121332964 @default.
- W2045687023 hasConceptScore W2045687023C137637335 @default.
- W2045687023 hasConceptScore W2045687023C145148216 @default.
- W2045687023 hasConceptScore W2045687023C147789679 @default.
- W2045687023 hasConceptScore W2045687023C171250308 @default.
- W2045687023 hasConceptScore W2045687023C178790620 @default.
- W2045687023 hasConceptScore W2045687023C179104552 @default.
- W2045687023 hasConceptScore W2045687023C185592680 @default.
- W2045687023 hasConceptScore W2045687023C191897082 @default.
- W2045687023 hasConceptScore W2045687023C191952053 @default.
- W2045687023 hasConceptScore W2045687023C192562407 @default.
- W2045687023 hasConceptScore W2045687023C2777855556 @default.
- W2045687023 hasConceptScore W2045687023C2779227376 @default.
- W2045687023 hasConceptScore W2045687023C2779889077 @default.
- W2045687023 hasConceptScore W2045687023C2780565262 @default.
- W2045687023 hasConceptScore W2045687023C41823505 @default.
- W2045687023 hasConceptScore W2045687023C43617362 @default.
- W2045687023 hasConceptScore W2045687023C49040817 @default.
- W2045687023 hasConceptScore W2045687023C501308230 @default.
- W2045687023 hasConceptScore W2045687023C502230775 @default.
- W2045687023 hasConceptScore W2045687023C544956773 @default.
- W2045687023 hasConceptScore W2045687023C57863236 @default.
- W2045687023 hasConceptScore W2045687023C69357855 @default.
- W2045687023 hasConceptScore W2045687023C87359718 @default.
- W2045687023 hasConceptScore W2045687023C95121573 @default.
- W2045687023 hasConceptScore W2045687023C97355855 @default.
- W2045687023 hasIssue "24" @default.
- W2045687023 hasLocation W20456870231 @default.
- W2045687023 hasOpenAccess W2045687023 @default.
- W2045687023 hasPrimaryLocation W20456870231 @default.
- W2045687023 hasRelatedWork W1976353914 @default.
- W2045687023 hasRelatedWork W2022581824 @default.
- W2045687023 hasRelatedWork W2056056139 @default.
- W2045687023 hasRelatedWork W2087392666 @default.
- W2045687023 hasRelatedWork W2092685021 @default.
- W2045687023 hasRelatedWork W2100711983 @default.
- W2045687023 hasRelatedWork W2323278906 @default.
- W2045687023 hasRelatedWork W2366851355 @default.
- W2045687023 hasRelatedWork W2371488926 @default.
- W2045687023 hasRelatedWork W2942876535 @default.