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• W2045756803 abstract "Abstract Thin gallium-doped zinc oxide (in GZO the Ga 2 O 3 contents are approximately 3 wt%) films having different ZnO buffer layers were deposited using radio frequency (rf) magnetron sputtering. The use of a grey-based Taguchi method to determine the processing parameters of ZnO buffer layer deposition has been studied by considering multiple performance characteristics. A Taguchi method with an L 9 orthogonal array, signal-to-noise (S/N) ratio, and analysis of variance (ANOVA) is employed to investigate the performance characteristics in the deposition operations. The effect and optimization of ZnO buffer deposition parameters (rf power, sputtering pressure, thickness, and annealing) on the structure, morphology, electrical resistivity, and optical transmittance of the GZO films are studied. Annealing treatment and reduction in thickness resulted in a decrease in root-mean-square (RMS) surface roughness of the ZnO buffer layer. Using the optimal ZnO buffer layer obtained by the application of the grey-based Taguchi method, the electrical resistivity of GZO films was decreased from 2.94×10 −3 to 9.44×10 −4  Ω cm and the optical transmittance in the visible region was slightly increased from 84.81% to 85.82%." @default.
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• W2045756803 date "2011-02-01" @default.
• W2045756803 modified "2023-09-26" @default.
• W2045756803 title "Structure and properties of GZO thin films grown on ZnO buffer layers" @default.
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• W2045756803 doi "https://doi.org/10.1016/j.spmi.2010.12.001" @default.
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