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- W2045792390 abstract "Vertical platinum sidewall structures 50 nm thick and 700 nm tall have been fabricated by Pt deposition from the thermal decomposition of tetrakis-(trifluorophosphine)-platinum using an effusive gas source followed by ion-assisted etching. Scanning electron microscope micrographs show that the sidewalls have high uniformity, very fine grains, and very sharp contours, demonstrating a high degree of conformal deposition. Scanning Auger microscopy confirms the presence of platinum only in the sidewalls. X-ray photoelectron spectroscopy analysis of the as-deposited platinum film reveals no detectable impurity and Scotch tape test shows good bonding of the film. The method is suitable to large-scale processing." @default.
- W2045792390 created "2016-06-24" @default.
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- W2045792390 date "1991-10-21" @default.
- W2045792390 modified "2023-10-06" @default.
- W2045792390 title "50 nm linewidth platinum sidewall lithography by effusive-source metal precursor chemical deposition and ion-assisted etching" @default.
- W2045792390 cites W2017720519 @default.
- W2045792390 doi "https://doi.org/10.1063/1.106070" @default.
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