Matches in SemOpenAlex for { <https://semopenalex.org/work/W2045793686> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2045793686 endingPage "478" @default.
- W2045793686 startingPage "476" @default.
- W2045793686 abstract "Abstract In this work we report on microstructures made of AlN for the use as piezoelectric microgenerators in energy harvesting applications. Experimental results on the mechanical and piezoelectrical properties of sputtered AlN thin films deposited on Si(001) substrates as well as results on vibrometry of fabricated microcantilevers are presented. It is shown that due to the constant d 33 piezo coefficients of > 5 pm/V, AlN films are well suited for the integration in cantilever structures for powering of low‐consumption sensor networks (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W2045793686 created "2016-06-24" @default.
- W2045793686 creator A5008334370 @default.
- W2045793686 creator A5016786637 @default.
- W2045793686 creator A5027301263 @default.
- W2045793686 creator A5046563921 @default.
- W2045793686 creator A5057421192 @default.
- W2045793686 creator A5081071159 @default.
- W2045793686 creator A5081204009 @default.
- W2045793686 creator A5082012641 @default.
- W2045793686 creator A5083212565 @default.
- W2045793686 date "2010-11-08" @default.
- W2045793686 modified "2023-10-18" @default.
- W2045793686 title "AlN based microgenerators for powering implantable sensor devices" @default.
- W2045793686 doi "https://doi.org/10.1002/pssc.201000503" @default.
- W2045793686 hasPublicationYear "2010" @default.
- W2045793686 type Work @default.
- W2045793686 sameAs 2045793686 @default.
- W2045793686 citedByCount "7" @default.
- W2045793686 countsByYear W20457936862012 @default.
- W2045793686 countsByYear W20457936862013 @default.
- W2045793686 countsByYear W20457936862015 @default.
- W2045793686 countsByYear W20457936862018 @default.
- W2045793686 crossrefType "journal-article" @default.
- W2045793686 hasAuthorship W2045793686A5008334370 @default.
- W2045793686 hasAuthorship W2045793686A5016786637 @default.
- W2045793686 hasAuthorship W2045793686A5027301263 @default.
- W2045793686 hasAuthorship W2045793686A5046563921 @default.
- W2045793686 hasAuthorship W2045793686A5057421192 @default.
- W2045793686 hasAuthorship W2045793686A5081071159 @default.
- W2045793686 hasAuthorship W2045793686A5081204009 @default.
- W2045793686 hasAuthorship W2045793686A5082012641 @default.
- W2045793686 hasAuthorship W2045793686A5083212565 @default.
- W2045793686 hasConcept C100082104 @default.
- W2045793686 hasConcept C101518730 @default.
- W2045793686 hasConcept C121332964 @default.
- W2045793686 hasConcept C127413603 @default.
- W2045793686 hasConcept C141354745 @default.
- W2045793686 hasConcept C159985019 @default.
- W2045793686 hasConcept C171250308 @default.
- W2045793686 hasConcept C186370098 @default.
- W2045793686 hasConcept C18762648 @default.
- W2045793686 hasConcept C19067145 @default.
- W2045793686 hasConcept C192562407 @default.
- W2045793686 hasConcept C49040817 @default.
- W2045793686 hasConcept C62520636 @default.
- W2045793686 hasConcept C78519656 @default.
- W2045793686 hasConcept C87976508 @default.
- W2045793686 hasConceptScore W2045793686C100082104 @default.
- W2045793686 hasConceptScore W2045793686C101518730 @default.
- W2045793686 hasConceptScore W2045793686C121332964 @default.
- W2045793686 hasConceptScore W2045793686C127413603 @default.
- W2045793686 hasConceptScore W2045793686C141354745 @default.
- W2045793686 hasConceptScore W2045793686C159985019 @default.
- W2045793686 hasConceptScore W2045793686C171250308 @default.
- W2045793686 hasConceptScore W2045793686C186370098 @default.
- W2045793686 hasConceptScore W2045793686C18762648 @default.
- W2045793686 hasConceptScore W2045793686C19067145 @default.
- W2045793686 hasConceptScore W2045793686C192562407 @default.
- W2045793686 hasConceptScore W2045793686C49040817 @default.
- W2045793686 hasConceptScore W2045793686C62520636 @default.
- W2045793686 hasConceptScore W2045793686C78519656 @default.
- W2045793686 hasConceptScore W2045793686C87976508 @default.
- W2045793686 hasIssue "2" @default.
- W2045793686 hasLocation W20457936861 @default.
- W2045793686 hasOpenAccess W2045793686 @default.
- W2045793686 hasPrimaryLocation W20457936861 @default.
- W2045793686 hasRelatedWork W1974010882 @default.
- W2045793686 hasRelatedWork W2076349672 @default.
- W2045793686 hasRelatedWork W2104720263 @default.
- W2045793686 hasRelatedWork W2107125189 @default.
- W2045793686 hasRelatedWork W2357307510 @default.
- W2045793686 hasRelatedWork W2357494341 @default.
- W2045793686 hasRelatedWork W2368223165 @default.
- W2045793686 hasRelatedWork W2760996480 @default.
- W2045793686 hasRelatedWork W3036249939 @default.
- W2045793686 hasRelatedWork W2303727101 @default.
- W2045793686 hasVolume "8" @default.
- W2045793686 isParatext "false" @default.
- W2045793686 isRetracted "false" @default.
- W2045793686 magId "2045793686" @default.
- W2045793686 workType "article" @default.