Matches in SemOpenAlex for { <https://semopenalex.org/work/W2045846976> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2045846976 endingPage "4170" @default.
- W2045846976 startingPage "4165" @default.
- W2045846976 abstract "Electrolyzed water (EW) has been applied to the wet cleaning in ultra-large-scale integration (ULSI) and liquid-crystal display (LCD) manufacturing processes. For supplying ultrapure EW as cleaning solutions in this field, an electrolytic cell composed of three chambers is developed. The cell generates EW featuring wide ranges of pH and oxidation−reduction potential with quite high purity similar to that of ultrapure water (UPW). EW generated by the cell has demonstrated the excellent abilities in removing contaminants from both ULSI and LCD substrates, despite the extremely low concentrations of chemicals. By dipping into anode water at room temperature, Cu above 1012 atoms/cm2 adhered on a Si wafer has been removed to below 1010 atoms/cm2, which meets the acceptable cleanliness in current ULSI device manufacturing. This anode water was generated from 10 mM HCl, which is less than 1/100 of chemicals compared with the conventional cleaning solution including several percentage points of each HCl and H2O2 and usually used in 60−70 °C. The mechanism of Cu removal by anode water has been clarified that the oxidative potential of ClO- produced by anodic oxidation from Cl- and acidic pH are the keys of the cleaning ability. Cathode water demonstrates excellent particle removal abilities. In the cleaning process after chemical mechanical polishing (CMP), cathode water removes SiO2 particles from above 20 000 to below 100. Particles adhered on an LCD substrate have also been removed efficiently by cathode water. It is presumed that reductive potential and increased cavitation, when used with ultrasonic wave irradiation, are the essential factors for the cleaning ability of cathode water. EW cleaning is the method which produces the necessary amount of effective component on site; thus, it can reduce chemicals and UPW consumption drastically. The EW cleaning method is highly expected not only to improve efficiency of surface cleaning but also to help the industrial manufacturing activities harmonize the protection of the global environment." @default.
- W2045846976 created "2016-06-24" @default.
- W2045846976 creator A5001800768 @default.
- W2045846976 creator A5007799037 @default.
- W2045846976 creator A5008868712 @default.
- W2045846976 creator A5011111105 @default.
- W2045846976 creator A5030447736 @default.
- W2045846976 creator A5040254126 @default.
- W2045846976 creator A5064345192 @default.
- W2045846976 creator A5064870797 @default.
- W2045846976 creator A5073633651 @default.
- W2045846976 date "1999-05-14" @default.
- W2045846976 modified "2023-09-23" @default.
- W2045846976 title "Electrolyzed Water as the Novel Cleaning Media in Ultra-Large-Scale Integration and Liquid-Crystal Display Manufacturing" @default.
- W2045846976 cites W1988958441 @default.
- W2045846976 cites W2048942065 @default.
- W2045846976 cites W2066962115 @default.
- W2045846976 cites W2077497515 @default.
- W2045846976 cites W2097427246 @default.
- W2045846976 cites W2107553265 @default.
- W2045846976 cites W2119989460 @default.
- W2045846976 doi "https://doi.org/10.1021/la981153r" @default.
- W2045846976 hasPublicationYear "1999" @default.
- W2045846976 type Work @default.
- W2045846976 sameAs 2045846976 @default.
- W2045846976 citedByCount "14" @default.
- W2045846976 countsByYear W20458469762012 @default.
- W2045846976 countsByYear W20458469762013 @default.
- W2045846976 countsByYear W20458469762016 @default.
- W2045846976 countsByYear W20458469762020 @default.
- W2045846976 crossrefType "journal-article" @default.
- W2045846976 hasAuthorship W2045846976A5001800768 @default.
- W2045846976 hasAuthorship W2045846976A5007799037 @default.
- W2045846976 hasAuthorship W2045846976A5008868712 @default.
- W2045846976 hasAuthorship W2045846976A5011111105 @default.
- W2045846976 hasAuthorship W2045846976A5030447736 @default.
- W2045846976 hasAuthorship W2045846976A5040254126 @default.
- W2045846976 hasAuthorship W2045846976A5064345192 @default.
- W2045846976 hasAuthorship W2045846976A5064870797 @default.
- W2045846976 hasAuthorship W2045846976A5073633651 @default.
- W2045846976 hasConcept C118039452 @default.
- W2045846976 hasConcept C127413603 @default.
- W2045846976 hasConcept C128019096 @default.
- W2045846976 hasConcept C134514944 @default.
- W2045846976 hasConcept C147789679 @default.
- W2045846976 hasConcept C159985019 @default.
- W2045846976 hasConcept C160671074 @default.
- W2045846976 hasConcept C171250308 @default.
- W2045846976 hasConcept C17525397 @default.
- W2045846976 hasConcept C185592680 @default.
- W2045846976 hasConcept C192562407 @default.
- W2045846976 hasConcept C2778829809 @default.
- W2045846976 hasConcept C42360764 @default.
- W2045846976 hasConcept C49040817 @default.
- W2045846976 hasConcept C49110097 @default.
- W2045846976 hasConcept C89395315 @default.
- W2045846976 hasConceptScore W2045846976C118039452 @default.
- W2045846976 hasConceptScore W2045846976C127413603 @default.
- W2045846976 hasConceptScore W2045846976C128019096 @default.
- W2045846976 hasConceptScore W2045846976C134514944 @default.
- W2045846976 hasConceptScore W2045846976C147789679 @default.
- W2045846976 hasConceptScore W2045846976C159985019 @default.
- W2045846976 hasConceptScore W2045846976C160671074 @default.
- W2045846976 hasConceptScore W2045846976C171250308 @default.
- W2045846976 hasConceptScore W2045846976C17525397 @default.
- W2045846976 hasConceptScore W2045846976C185592680 @default.
- W2045846976 hasConceptScore W2045846976C192562407 @default.
- W2045846976 hasConceptScore W2045846976C2778829809 @default.
- W2045846976 hasConceptScore W2045846976C42360764 @default.
- W2045846976 hasConceptScore W2045846976C49040817 @default.
- W2045846976 hasConceptScore W2045846976C49110097 @default.
- W2045846976 hasConceptScore W2045846976C89395315 @default.
- W2045846976 hasIssue "12" @default.
- W2045846976 hasLocation W20458469761 @default.
- W2045846976 hasOpenAccess W2045846976 @default.
- W2045846976 hasPrimaryLocation W20458469761 @default.
- W2045846976 hasRelatedWork W2031797639 @default.
- W2045846976 hasRelatedWork W2045846976 @default.
- W2045846976 hasRelatedWork W2111830557 @default.
- W2045846976 hasRelatedWork W2748952813 @default.
- W2045846976 hasRelatedWork W2899084033 @default.
- W2045846976 hasRelatedWork W3172532635 @default.
- W2045846976 hasRelatedWork W4210444521 @default.
- W2045846976 hasRelatedWork W4285384414 @default.
- W2045846976 hasRelatedWork W4294384733 @default.
- W2045846976 hasRelatedWork W4321596270 @default.
- W2045846976 hasVolume "15" @default.
- W2045846976 isParatext "false" @default.
- W2045846976 isRetracted "false" @default.
- W2045846976 magId "2045846976" @default.
- W2045846976 workType "article" @default.