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- W2045908076 abstract "Interfacial adhesion is an important factor in determining the performance and reliability of microelectromechanical systems (MEMS). Van der Waals dispersion forces are the dominant adhesion mechanism in the low relative humidity (RH) regime. At small roughness values, adhesion is mainly due to van der Waals dispersion forces acting across extensive non-contacting areas and is related to 1/Dave2, where Dave is the average surface separation. These contributions must be considered due to the close proximity of the surfaces, which is a result of the planar deposition technology. At large roughness values, van der Waals forces at contacting asperities become the dominating contributor to the adhesion. Capillary condensation of water has a significant effect on rough surface adhesion in the moderate to high RH regime. Above a threshold RH, which is a function of the surface roughness, the adhesion jumps due to meniscus formation at the interface and increases rapidly towards the upper limit of Γ=2 γcos θ=144 mJ/m2, where γ is the liquid surface energy and θ is the contact angle." @default.
- W2045908076 created "2016-06-24" @default.
- W2045908076 creator A5011613373 @default.
- W2045908076 creator A5029506293 @default.
- W2045908076 creator A5033189306 @default.
- W2045908076 creator A5051678354 @default.
- W2045908076 creator A5061871359 @default.
- W2045908076 date "2006-01-01" @default.
- W2045908076 modified "2023-10-03" @default.
- W2045908076 title "Van der Waals and Capillary Adhesion of Microelectromechanical Systems" @default.
- W2045908076 cites W1975216008 @default.
- W2045908076 cites W2012458214 @default.
- W2045908076 cites W2018181242 @default.
- W2045908076 cites W2065452626 @default.
- W2045908076 cites W2103882323 @default.
- W2045908076 cites W2123498192 @default.
- W2045908076 cites W2127187711 @default.
- W2045908076 cites W2137178805 @default.
- W2045908076 cites W2161276429 @default.
- W2045908076 cites W2163941307 @default.
- W2045908076 doi "https://doi.org/10.1115/imece2006-15169" @default.
- W2045908076 hasPublicationYear "2006" @default.
- W2045908076 type Work @default.
- W2045908076 sameAs 2045908076 @default.
- W2045908076 citedByCount "2" @default.
- W2045908076 countsByYear W20459080762019 @default.
- W2045908076 countsByYear W20459080762023 @default.
- W2045908076 crossrefType "proceedings-article" @default.
- W2045908076 hasAuthorship W2045908076A5011613373 @default.
- W2045908076 hasAuthorship W2045908076A5029506293 @default.
- W2045908076 hasAuthorship W2045908076A5033189306 @default.
- W2045908076 hasAuthorship W2045908076A5051678354 @default.
- W2045908076 hasAuthorship W2045908076A5061871359 @default.
- W2045908076 hasConcept C107365816 @default.
- W2045908076 hasConcept C120665830 @default.
- W2045908076 hasConcept C121332964 @default.
- W2045908076 hasConcept C126061179 @default.
- W2045908076 hasConcept C147789679 @default.
- W2045908076 hasConcept C150394285 @default.
- W2045908076 hasConcept C159467904 @default.
- W2045908076 hasConcept C159985019 @default.
- W2045908076 hasConcept C171250308 @default.
- W2045908076 hasConcept C178790620 @default.
- W2045908076 hasConcept C185424724 @default.
- W2045908076 hasConcept C185592680 @default.
- W2045908076 hasConcept C189178095 @default.
- W2045908076 hasConcept C192562407 @default.
- W2045908076 hasConcept C195839 @default.
- W2045908076 hasConcept C196806460 @default.
- W2045908076 hasConcept C200093464 @default.
- W2045908076 hasConcept C32909587 @default.
- W2045908076 hasConcept C61511704 @default.
- W2045908076 hasConcept C71039073 @default.
- W2045908076 hasConcept C84351421 @default.
- W2045908076 hasConcept C84416704 @default.
- W2045908076 hasConcept C97355855 @default.
- W2045908076 hasConceptScore W2045908076C107365816 @default.
- W2045908076 hasConceptScore W2045908076C120665830 @default.
- W2045908076 hasConceptScore W2045908076C121332964 @default.
- W2045908076 hasConceptScore W2045908076C126061179 @default.
- W2045908076 hasConceptScore W2045908076C147789679 @default.
- W2045908076 hasConceptScore W2045908076C150394285 @default.
- W2045908076 hasConceptScore W2045908076C159467904 @default.
- W2045908076 hasConceptScore W2045908076C159985019 @default.
- W2045908076 hasConceptScore W2045908076C171250308 @default.
- W2045908076 hasConceptScore W2045908076C178790620 @default.
- W2045908076 hasConceptScore W2045908076C185424724 @default.
- W2045908076 hasConceptScore W2045908076C185592680 @default.
- W2045908076 hasConceptScore W2045908076C189178095 @default.
- W2045908076 hasConceptScore W2045908076C192562407 @default.
- W2045908076 hasConceptScore W2045908076C195839 @default.
- W2045908076 hasConceptScore W2045908076C196806460 @default.
- W2045908076 hasConceptScore W2045908076C200093464 @default.
- W2045908076 hasConceptScore W2045908076C32909587 @default.
- W2045908076 hasConceptScore W2045908076C61511704 @default.
- W2045908076 hasConceptScore W2045908076C71039073 @default.
- W2045908076 hasConceptScore W2045908076C84351421 @default.
- W2045908076 hasConceptScore W2045908076C84416704 @default.
- W2045908076 hasConceptScore W2045908076C97355855 @default.
- W2045908076 hasLocation W20459080761 @default.
- W2045908076 hasOpenAccess W2045908076 @default.
- W2045908076 hasPrimaryLocation W20459080761 @default.
- W2045908076 hasRelatedWork W166504513 @default.
- W2045908076 hasRelatedWork W1978644099 @default.
- W2045908076 hasRelatedWork W1982396087 @default.
- W2045908076 hasRelatedWork W2045908076 @default.
- W2045908076 hasRelatedWork W2059432802 @default.
- W2045908076 hasRelatedWork W2323848858 @default.
- W2045908076 hasRelatedWork W3099890113 @default.
- W2045908076 hasRelatedWork W3196754378 @default.
- W2045908076 hasRelatedWork W3206436114 @default.
- W2045908076 hasRelatedWork W4281839207 @default.
- W2045908076 isParatext "false" @default.
- W2045908076 isRetracted "false" @default.
- W2045908076 magId "2045908076" @default.
- W2045908076 workType "article" @default.